Overview
- Many tables with equations required for calculations of basic elements
- Systematic description of most actuators and sensors in micro technique
- Includes exercises Characteristic curves of most actuators and sensors
- Includes supplementary material: sn.pub/extras
Part of the book series: RWTHedition (RWTH, volume 1)
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About this book
The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.
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Keywords
Table of contents (23 chapters)
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Front Matter
Authors and Affiliations
About the author
Univ.-Prof. Dr. Werner Karl Schomburg was born in 1955 at Kiel, Germany. In 1983 he got his diploma in theoretical physics from Kiel University. He stayed at CERN in Geneva, Switzerland, for 3 month in 1982. He obtained his PhD from a university at Munich (LMU) in experimental nuclear physics in 1988. Until 2003 Prof. Schomburg was working at Karlsruhe Research Center, Institute of Micro Structure Technique. His group developed in this time the first micro pump, the first micro valve, and the first micro flow and micro pressure sensor from polymer. In 2004 he became a professor at RWTH Aachen University. From 2006 to 2009 he spent 3 weeks each year teaching at Tsinghua University in Beijing, China.
Bibliographic Information
Book Title: Introduction to Microsystem Design
Authors: Werner Karl Schomburg
Series Title: RWTHedition
DOI: https://doi.org/10.1007/978-3-642-19489-4
Publisher: Springer Berlin, Heidelberg
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2011
Softcover ISBN: 978-3-642-26852-6Published: 03 August 2013
eBook ISBN: 978-3-642-19489-4Published: 30 May 2011
Series ISSN: 1865-0899
Series E-ISSN: 1865-0902
Edition Number: 1
Number of Pages: XXII, 322
Topics: Nanotechnology and Microengineering, Optical and Electronic Materials, Applied and Technical Physics, Circuits and Systems