Abstract
Residual vibration of the system base due to the rapid acceleration of a motion stage may significantly reduce life span and productivity of the manufacturing equipment. Although a passive reaction force compensation (RFC) mechanism was developed to reduce the residual vibration of a linear motor motion stage, the passive RFC cannot adjust its dynamic characteristic against the motion profile variation. An active RFC mechanism using an additional coil can tune spring and damping of the RFC system according to the motion profile of the mover, but both cost and energy consumption of the active RFC are very high and it is not suitable for green manufacturing. In this paper, we develop a semi-active RFC method by switching an extra coil for a linear motor motion stage to tune damping of the RFC system against the motion profile variations. First, we investigate the effect of switching the extra coil with free vibration test of the magnet track, which shows that the damping of the RFC can be adjusted by the open-close ratio of the extra coil. In addition, two kinds of motion profiles such as long and short stroke motions are used to confirm the semi-active RFC by switching the extra coil. The effectiveness of the semi-active RFC method was verified with simulations and experiments.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
Abbreviations
- k MT :
-
Stiffness of magnet track
- c MT :
-
Damping of magnet track
- m MT :
-
Mass of magnet track
- a,b,c :
-
a-b-c three phase coordinate
- i a ,i b ,i c :
-
Three phase currents in a-b-c frame
- I d ,I q :
-
Currents in d-q frame
- e an ,e bn ,e cn :
-
Back-EMF of extra coil
- R coil :
-
Resistance of extra coil
- L coil :
-
Inductance of extra coil
- R load :
-
Load resistance
- R q coil :
-
Resistor of coil in q-axis
- L q coil :
-
Inductance of extra coil in q-axis
- R q load :
-
Resistance load in q-axis
- r OC :
-
Open-close time ratio
- e q coil :
-
Back-EMF in q-axis
- c coil :
-
Damping coefficient of extra coil
- F t :
-
Thrust force of mover
- F coil :
-
Lorentz force of extra coil
- F trans :
-
Transmitted force
- p :
-
Number of pole pairs
- τ :
-
Magnet track pole pitch
- ψ :
-
Flux linkage of magnet track
- K emf :
-
Electromotive force gain
- K f :
-
Force constant of extra coil
References
Newport, “DynamYX DATUM Ultra-High Performance Air Bearing Stage, http://www.newport.com/DynamYX-DATUM-Ultra-High-Performance-Stage/646127/1033/info.aspx (Accessed 8 December 2016)
Yu, P., Chen, X., Wang, X., and Jiang, W., “Frequency-Dependent Nonlinear Dynamic Stiffness of Aerostatic Bearings Subjected to External Perturbations,” Int. J. Precis. Eng. Manuf., Vol. 16, No. 8, pp. 1771–1777, 2015.
Woo, S. and Gweon, D.-G., “Design and Optimization of Long Stroke Planar Motion Maglev Stage Using Copper Strip Array,” Int. J. Precis. Eng. Manuf., Vol. 16, No. 3, pp. 479–485, 2015.
Li, H., Le, M., Gong, Z., and Lin, W., “Motion Profile Design to Reduce Residual Vibration of High-Speed Positioning Stages,” IEEE/ASME Transactions On Mechatronics, Vol. 14, No. 2, pp. 264–269, 2009.
Iwasaki, M., Seki, K., and Maeda, Y., “High-Precision Motion Control Techniques: A Promising Approach to Improving Motion Performance,” IEEE Industrial Electronics Magazine, Vol. 6, No. 1, pp. 32–40, 2012.
Arakelian, V. H. and Smith, M., “Shaking Force and Shaking Moment Balancing of Mechanisms: A Historical Review with New Examples,” Journal of Mechanical Design, Vol. 127, No. 2, pp. 334–339, 2005.
You, Y.-H. and Ahn, H.-J., “A Passive Reaction Force Compensation (RFC) Mechanism for a Linear Motor Motion Stage,” Int. J. Precis. Eng. Manuf., Vol. 15, No. 5, pp. 797–801, 2014.
Nguyen, D. C. and Ahn, H. J., “Dynamic Analysis and Iterative Design of a Passive Reaction Force Compensation Device for a Linear Motor Motion Stage,” Int. J. Precis. Eng. Manuf., Vol. 15, No. 11, pp. 2367–2373, 2014.
Ahn, H.-J., “Eddy Current Damper Type Reaction Force Compensation Mechanism for Linear Motor Motion Stage,” Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 3, No. 1, pp. 67–74, 2016.
Nguyen, D. C. and Ahn, H.-J., “A Fuzzy-P Controller of an Active Reaction Force Compensation (RFC) Mechanism for a Linear Motor Motion Stage,” Int. J. Precis. Eng. Manuf., Vol. 16, No. 6, pp. 1067–1074, 2015.
Dornfeld, D. A., “Green Manufacturing: Fundamentals and Applications,” Springer Science & Business Media, 2012.
Diaz, N., Choi, S., Helu, M., Chen, Y., Jayanathan, S., et al., “Machine Tool Design and Operation Strategies for Green Manufacturing,” Proc. of 4th CIRP Conference on High Performance Cutting, 2010.
Karnopp, D., “Permanent Magnet Linear Motors Used as Variable Mechanical Dampers for Vehicle Suspensions,” Vehicle System Dynamics: International Journal of Vehicle Mechanics and Mobility, Vo. 8, No. 4, pp. 187–200, 1989.
Cassidy, I. L., Scruggs, J. T., Behrens, S., and Gavin, H. P., “Design and Experimental Characterization of an Electromagnetic Transducer for Large-Scale Vibratory Energy Harvesting Applications,” Journal of Intelligent Material Systems and Structures, Vol. 22, No. 17, pp. 2009–2024, 2011.
Nguyen, D. C. and Ahn, H.-J., “Semi-Active Reaction Force Compensation for a Linear Motor Motion Stage,” Int. J. Precis. Eng. Manuf., Vol. 17, No. 7, pp. 857–862, 2016.
Ahn, H. J. and Kim, K. R., “2D Hall Sensor Array for Measuring the Position of a Magnet Matrix,” Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 1, No. 2, pp. 125–129, 2014.
Pham, M.-N. and Ahn, H.-J., “Horizontal Active Vibration Isolator (HAVI) Using Electromagnetic Planar Actuator (EPA),” Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 2, No. 3, pp. 269–274, 2015.
Hassell, T. J., Weaver, W. W., and Oliveira, A. M., “Using Matlab’s Simscape Modeling Environment as A Simulation Tool in Power Electronics and Electrical Machines Courses,” Proc. of the IEEE Frontiers in Education Conference, pp. 477–483, 2013.
Villegas, F., Hecker, R. L., and Peña, M., “Two-State GMS-Based Friction Model for Precise Control Applications,” Int. J. Precis. Eng. Manuf., Vol. 17, No. 5, pp. 553–564, 2016.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Hoang, K.D., Ahn, HJ. Both energy and cost-effective semi-active RFC (reaction force compensation) method for linear motor motion stage. Int. J. of Precis. Eng. and Manuf.-Green Tech. 4, 73–78 (2017). https://doi.org/10.1007/s40684-017-0010-5
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s40684-017-0010-5