Abstract
The main purpose of this proposed maglev stage is to transport a 450 mm wafer in a vacuum environment. To realize a long stroke and a large size mover, a stator was designed using a copper strip array. The mover contains a halbach magnet array and the fixture part has characteristics of low weight and high structural bandwidth for fast response. Since the relationship between the design variables and the system performance is complicated, an optimization procedure was used to obtain optimal design variables. Based on the optimization solution, detailed design was performed and the system’s stability was checked by several simulations. Finally, the proposed maglev system was manufactured.
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Kim, W. J., Trumper, D. L., and Bryan, J. B., “Linear Motor-Leviated Stage for Photolithography,” CIRP Annals-Manufacturing Technology, Vol. 46, No. 1, pp. 447–450, 1997.
Kim, W. J. and Trumper, D. L., “High-Precision Magnetic Levitation Stage for Photolithography,” Precision Engineering, Vol. 22, No. 2, pp. 66–77, 1998.
Ueda, Y. and Ohsaki, H., “Fundamental Characteristics of a Small Actuator with a Magnetically Levitated Mover,” Proc. of Power Conversion Conference, pp. 614–621, 2007.
Ueda, Y., and Ohsaki, H., “A Planar Actuator with a Small Mover Traveling Over Large Yaw and Translational Displacements,” IEEE Transactions on Magnetics, Vol. 44, No. 5, pp. 609–616, 2008.
Ueda, Y. and Ohsaki, H., “Six-Degree-of-Freedom Motion Analysis of a Planar Actuator with a Magnetically Levitated Mover by Six- Phase Current Controls,” IEEE Transactions on Magnetics, Vol. 44, No. 11, pp. 4301–4304, 2008.
Jansen, J., Lomonova, E., Vandenput, A., and Compter, J., “Design Tool for a 6-DOF Planar Motor with Moving Permanent Magnets and Standstill Coils,” Proc. of 4th International Symposium on Linear Drives for Industry Applications, pp. 8–10, 2003.
de Boeij, J., Lomonova, E., and Vandenput, A., “Modeling Ironless Permanent-Magnet Planar Actuator Structures,” IEEE Transactions on Magnetics, Vol. 42, No. 8, pp. 2009–2016, 2006.
Boeij, J. D. and Lomonova, E., “Experimental Verification of Look-up Table based Real-Time Commutation of 6-DOF Planar Actuators,” Journal of System Design and Dynamics, Vol. 3, No. 4, pp. 563–571, 2009.
Philips, “Mechatronics and High Precision Engineering,” http://www.innovationservices.philips.com/service-catalog/competences/mechatronics-and-high-precision-engineering (Accessed 23 FEB 2015)
Jansen, J. W., van Lierop, C. M. M., Lomonova, E. A., and Vandenput, A. J. A., “Ironless Magnetically Levitated Planar Actuator,” Journal of Applied Physics, Vol. 103, No. 7, Paper No. 07E905, 2008.
Jansen, J. W., Van Lierop, C. M. M., Lomonova, E. A., and Vandenput, A. J. A., “Magnetically Levitated Planar Actuator with Moving Magnets,” IEEE Transactions on Industry Applications, Vol. 44, No. 4, pp. 1108–1115, 2008.
Lu, X., “6D Direct-Drive Technology for Planar Motion Stages,” CIRP Annals-Manufacturing Technology, Vol. 61, No. 1, pp. 359–362, 2012.
Furlani, E. P., “Permanent Magnet and Electromechanical Devices,” Academic Press, 1st Ed., pp. 97–205, 2001.
Akoun, G. and Yonnet, J.-P., “3d Analytical Calculation of the Forces Exerted between Two Cuboidal Magnets,” IEEE Transactions on Magnetics, Vol. 20, No. 5, pp. 1962–1964, 1984.
Jansen, J. W., Van Lierop, C. M. M., Lomonova, E. A., and Vandenput, A. J. A., “Modeling of Magnetically Levitated Planar Actuators with Moving Magnets,” IEEE Transactions on Magnetics, Vol. 43, No. 1, pp. 15–25, 2007.
Arora, J. S., “Introduction to Optimum Design,” Academic Press, pp. 339–432, 2004.
Boender, C. G. E. and Kan, A. R., “Bayesian Stopping Rules for Multistart Global Optimization Methods,” Mathematical Programming, Vol. 37, No. 1, pp. 59–80, 1987.
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Woo, S., Gweon, DG. Design and optimization of long stroke planar motion maglev stage using copper strip array. Int. J. Precis. Eng. Manuf. 16, 479–485 (2015). https://doi.org/10.1007/s12541-015-0065-6
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DOI: https://doi.org/10.1007/s12541-015-0065-6