Abstract
The base vibration of a linear motor motion stage has been reduced with a passive reaction force compensation (RFC) mechanism based on a movable magnet track and springs. This paper presents the design procedure of an eddy-current damper (ECD) type RFC mechanism for a linear motor motion stage. The RFC mechanism with a movable magnet track and an ECD can overcome the disadvantages of the spring based RFC mechanism such as resonance and difficulty of assembly due to springs. A lumped parameter model for the ECD type RFC mechanism is derived considering sinusoidal magnetic flux density and the effective width of the ECD according to magnet track motion. Then, an iterative design procedure for ECD type RFC mechanisms is proposed to meet system requirements such as the transmission ratio of the reaction force and the maximum magnet track motion. Finally, a design example illustrates the effectiveness of the proposed design procedure for an ECD type RFC mechanism.
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Abbreviations
- B :
-
Flux density in the magnet track
- c MT :
-
Damping of the RFC mechanism
- d :
-
Location of ECD
- f ECD :
-
Force of ECD
- f f :
-
Thrust force for mover friction
- f fc :
-
Coulomb friction force
- f fs :
-
Difference between max static and Coulomb friction forces
- f m :
-
Thrust force for mover motion profile
- f T :
-
Thrust force
- f TR :
-
Transmitted force
- k MT :
-
Stiffness of the RFC mechanism
- k v :
-
Viscous friction coefficient of mover
- l :
-
Height of ECD
- m Base :
-
Mass of system base
- m D :
-
Dummy mass for magnet track
- m M :
-
Mass of mover
- m MT :
-
Mass of magnet track
- n s :
-
Exponent coefficient for stribeck effect
- sgn:
-
Sign function
- t :
-
Thickness of ECD
- T a :
-
Acceleration time (constant acceleration)
- T dw :
-
Dwell time (zero velocity)
- T r :
-
Run time (zero acceleration or constant velocity)
- v s :
-
Stribeck velocity
- w :
-
Width of ECD
- w e :
-
Effective width of ECD
- x M :
-
Position of mover
- x MT :
-
Position of magnet track
- α :
-
Geometric coefficient
- σ :
-
Conductivity of the conductor
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Ahn, HJ. Eddy current damper type reaction force compensation mechanism for linear motor motion stage. Int. J. of Precis. Eng. and Manuf.-Green Tech. 3, 67–74 (2016). https://doi.org/10.1007/s40684-016-0009-3
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DOI: https://doi.org/10.1007/s40684-016-0009-3