Abstract
This paper presents a horizontal active vibration isolator (HAVI) using both horizontal and vertical forces of an electromagnetic planar actuator (EPA). The horizontal force is used to reject horizontal disturbance while the vertical force is applied to adjust natural frequency of the HAVI. A simulation model of the active horizontal isolator with flexible beam column (FBC) is built and active isolation methodology using both horizontal and vertical forces of the EPA is implemented. Simulations and experiments show that PID gain of the HAVI is tuned properly so that the horizontal vibration due to impulse disturbance is reduced by 90%. In addition, vertical force of the EPA can reduce the natural frequency by 40% for improving its ground isolation performance, compared to horizontal force only.
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Abbreviations
- A 1−3 :
-
approximate dimensionless coefficients for horizontal stiffness of FBC
- c :
-
dimensionless damping coefficient
- g :
-
dimensionless gravity acceleration
- F x,y,z , f x,y,z :
-
dimensionless and dimensionless forces of EPA
- i d,q :
-
direct and quadrature currents of EPA
- Kf x,y,z :
-
dimensionless horizontal and vertical stiffness of FBC
- k p , k i , k d :
-
PID gain of controller
- L a , L b :
-
length of flexible and rigid parts of FBC
- m :
-
dimensionless mass of isolator
- n :
-
shape ratio of FBC
- n b :
-
number of FBCs
- r a,b :
-
radius of flexible and rigid parts of FBC
- z g :
-
air gap of EPA
- δ x,z :
-
small dimensionless horizontal and verital deformation of FBC
- τ :
-
magnet pitch
- λ pm :
-
maximum flux linkage
- ω x,y (t):
-
dimensionless disturbance
References
Watters, B. G., Coleman, R. B., Duckworth, G. L., and Berkman, E. F., “A Perspective of Active Machinery Isolation,” Proc. of the 27th IEEE Conference on Decision and Control, Vol. 3, pp. 2033–2038, 1988.
Crosby, M. J. and Karnopp, D. C., “The Active Damper- A New Concept for Shock and Vibration Control,” Shock and Vibration Bulletin, Vol. 43, pp. 119–133, 1973.
Jenkins, M. D. and Nelson, P. A., “Active Isolation of Periodic Machinery Vibration from Resonant Substructures,” Journal of Environmental Engineering, Vol. 4, No. 3, pp. 6–11, 1991.
Karnopp, D. C., Crosby, M. J., and Harwood, R. A., “Vibration Control Using Semi-Active Force Generators,” Journal of Manufacturing Science and Engineering, Vol. 96, No. 2, pp. 619–626, 1974.
Nelson, F. C., “Vibration Isolation: A Review, I. Sinusoidal and Random Excitations,” Shock and Vibration, Vol. 1, No. 5, pp. 485–493, 1994.
Harris, C. M. and Crede, C. E., “Shock and Vibration Handbook,” 3rd Ed., McGraw Hill, 1988.
Snowdon, J. C., “Isolation and Absorption of Machinery Vibration,” Acta Acustica United with Acustica, Vol. 28, No. 6, pp. 307–317, 1973.
Miller, L. R., “Tuning Passive, Semi-Active and Fully Active Suspension Systems,” Proc. of the 27th IEEE Conference on Decision and Control, Vol. 3, pp. 2047–2053, 1988.
Meirovitch, L., “Elements of Vibration Analysis,” 2nd Ed., McGraw Hill, 1986.
Inman, D. J., “Engineering Vibration,” Prentice-Hall, 1996.
Pham, V. T., Kim, K. R., and Ahn, H. J., “A Nonlinear Control of a QZS Isolator with Flexures Based on a Lyapunov Function,” Int. J. Precis. Eng. Manuf., Vol. 14, No. 6, pp. 919–924, 2013.
Kim, K. R., You Y. H., and Ahn, H. J., “Optimal Design of a QZS Isolator Using Flexures for a Wide Range of Payload,” Int. J. Precis. Eng. Manuf., Vol. 14, No. 6, pp. 911–917, 2013.
Huang, X., Liu, X., Sun, J., Zhang, Z., and Hua, H., “Vibration Isolation Characteristics of a Nonlinear Isolator Using Euler Bucked Flexible Beam as Negative Stiffness Corrector: A Theoretical and Experimental Study,” Journal of Sound and Vibration, Vol. 333, No. 4, pp. 1132–1148, 2014.
Tang, B. and Brennan, M. J., “On the Shock Performance of a Nonlinear Vibration Isolator with High-Static-Low-Dynamic- Stiffness,” International Journal of Mechanical Sciences, Vol. 81, pp. 207–214, 2014.
Shin, K., “On the Performance of a Single Degree-of-Freedom High-Static-Low-Dynamic Stiffness Magnetic Vibration Isolator,” Int. J. Precis. Eng. Manuf., Vol. 15, No. 3, pp. 439–445, 2014.
Chang S. H., Tseng C. K., and Chien H. C., “An Ultra-Precision XYz Piezo-Micropositioner Part I: Design and Analysis,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 46, No. 4, pp. 897–905, 1999.
Shinno, H., Yoshioka, H., and Taniguchi, K., “A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-Machining,” CIRP Annals- Manufacturing Technology, Vol. 56, No. 1, pp. 369–372, 2007.
Hong, D. P., Hwang, H. Y., Lee, M. Y., Jo, Y. K., Vu, D. T., et al., “New Electro-Magnetic Actuator for Active Vibration Isolators,” Int. J. Precis. Eng. Manuf., Vol. 16, No. 1, pp. 209–212, 2015.
Compter, J. C. and Frissen, P. C. M, “Electro-Dynamic Planar Actuator,” Proc. of Mechatronics, pp. 81–87, 2002.
Trumper, D. L., “Magnetic Suspension Techniques for Precision Motion Control,” Ph.D. Thesis, Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, 1990.
Trumper, D. L., Olson, S. M., and Subrahmanyan, P. K., “Linearizing Control of Magnetic Suspension Systems,” IEEE Transactions on Control Systems Technology, Vol. 5, No. 4, pp. 427–438, 1997.
van Lierop, C. M. M., Jansen, J. W., Damen, A. A. H., and van den Bosch, P. P. J., “Control of Multi-Degree-of-Freedom Planar Actuators,” IEEE International Symposium on Intelligent Control, pp. 2516–2521, 2006.
Kim, W., Hu, T., and Bhat, N. D., “Design and Control of a 6-DOF High-Precision Integrated Positioner,” Proc. of the American Control Conference, pp. 2493–2498, 2004.
Lu, X., Rao, N., and Usman, I. U. R., “Six-Axis Position Measurement System for Levitated Motion Stages,” CIRP Annals- Manufacturing Technology, Vol. 62, No. 1, pp. 507–510, 2013.
Ahn, H. J. and Kim, K. R., “2D Hall Sensor Array for Measuring the Position of a Magnet Matrix,” Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 1, No. 2, pp. 125–129, 2014.
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Pham, MN., Ahn, HJ. Horizontal active vibration isolator (HAVI) using electromagnetic planar actuator (EPA). Int. J. of Precis. Eng. and Manuf.-Green Tech. 2, 269–274 (2015). https://doi.org/10.1007/s40684-015-0032-9
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DOI: https://doi.org/10.1007/s40684-015-0032-9