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Porous Silicon for Microdevices and Microsystems

Handbook of Porous Silicon

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Abstract

A literature survey is made of the various uses of both macroporous and mesoporous silicon in individual microdevices and complex microsystems. The material has been used as a silicon wafer processing tool where it is sacrificial: in a passive role where it provides, for example, thermal or electrical isolation and in an active role where it performs a range of functions. Examples include delivering drugs, sensing, emitting light, storing hydrogen, providing filtration, or having a catalytic role.

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Authors and Affiliations

  1. IMM-CNR Institute for Microelectronics and Microsystems – Unit of Naples, National Research Council, Via P. Castellino 111, 80131, Naples, Italy

    Dr. Luca De Stefano & Ilaria Rea

Authors
  1. Dr. Luca De Stefano
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  2. Ilaria Rea
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Correspondence to Luca De Stefano .

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Editors and Affiliations

  1. Malvern Hills Science Park, Chief Scientific Officer, Intrinsiq Mate, Malvern, Worcestershire, United Kingdom

    Leigh Canham

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De Stefano, L., Rea, I. (2014). Porous Silicon for Microdevices and Microsystems. In: Canham, L. (eds) Handbook of Porous Silicon. Springer, Cham. https://doi.org/10.1007/978-3-319-04508-5_81-1

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  • DOI: https://doi.org/10.1007/978-3-319-04508-5_81-1

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  • Publisher Name: Springer, Cham

  • Online ISBN: 978-3-319-04508-5

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  1. Latest

    Porous Silicon for Microdevices and Microsystems
    Published:
    26 December 2016

    DOI: https://doi.org/10.1007/978-3-319-04508-5_81-2

  2. Original

    Porous Silicon for Microdevices and Microsystems
    Published:
    07 May 2014

    DOI: https://doi.org/10.1007/978-3-319-04508-5_81-1

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