Porous Si is formed out of single crystalline silicon in a CMOScompatible electrochemical etch process. This material provides due to its nanoporous structure and high porosity several applications in microsystems/ MEMS. Applications of porous Si are found in optics (luminescence, electroluminescence, Bragg-filters), sensing (humidity, gas sensing), chemical reactions (reformers and fuel cells) and microfabrication (sacrificial layer, 3D structuring). Results of research work in our laboratory are presented together with a review of most relevant results of other groups.
Keywords: Porous Silicon, multifunctional material, MEMS, microsystem technology, Si-technology, Si-micromachining, humidity sensor
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© 2004 Springer
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Mescheder, U. (2004). Porous Silicon: Technology and Applications for Micromachining and MEMS. In: Yurish, S.Y., Gomes, M.T.S.R. (eds) Smart Sensors and MEMS. NATO Science Series, vol 181. Springer, Dordrecht. https://doi.org/10.1007/978-1-4020-2929-5_9
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DOI: https://doi.org/10.1007/978-1-4020-2929-5_9
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