Abstract
To enhance the machining efficiency of electrochemical micromachining (EMM), the low-frequency sinusoidal oscillating motion was applied to the workpiece, while the tool electrode moved in controlled trajectory. Mathematical model for the material removal rate (MRR) and the pressure in the interelectrode gap were derived. The mechanisms of enhancing the mass transport in the interelectrode gap induced by the oscillating workpiece during EMM have been analyzed, based on the variation of pressure in the interelectrode gap. An experimental setup has been developed for EMM. Experiments were conducted to investigate the influences of a vibrating amplitude and frequency on the machining efficiency, stability, and achievable maximum feeding rate of the tool electrode. The results indicated that a larger vibrating amplitude and a proper frequency were suitable for obtaining a higher material removal rate during EMM. The highest feeding rate of 0.3 μm/s has been obtained utilizing oscillating workpiece during the machining of microgrooves. Both the theoretical and the experimental results indicated that the oscillating workpiece during EMM was beneficial to improving the machining efficiency. Finally, microstructures with the circular profiles were processed using EMM, by a tool electrode feeding rate of 0.3 μm/s and the workpiece oscillation with the amplitude of 0.5 μm and frequency of 60 Hz.
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References
Lee ES, Baek SY, Cho CR (2007) A study of the characteristics for electrochemical micromachining with ultrashort voltage pulses. Int J Adv Manuf Technol 31:762–769
Rajurkar KP, Levy G, Malshe A, Sundaram MM, McGeough J, Hu X, Resnick R, DeSilva A (2006) Micro and nano machining by electro-physical and chemical processes. CIRP Ann - Manuf Technol 55:643–666
Schuster R, Kirchner V, Allongue P, Ertl G (2000) Electrochemical micromachining. Science 289:98–101
Kock M, Kirchner V, Schuster R (2003) Electrochemical micromachining with ultrashort voltage pulses – a versatile method with lithographical precision. Electrochim Acta 48:3213–3219
Ahn SH, Shi HR, Choi DK, Chu CN (2004) Electro-chemical micro drilling using ultra short pulses. Precis Eng 28:129–134
Kim BH, Ryu SH, Choi DK, Chu CN (2005) Micro electrochemical milling. J Micromech Microeng 15:124–129
Liu Y, Zhu D, Zhu L (2012) Micro electrochemical milling of complex structures by using in situ fabricated cylindrical electrode. Int J Adv Manuf Technol 60:977–984
Mithu MAH, Fantoni G, Ciampi J (2011) The effect of high frequency and duty cycle in electrochemical microdrilling. Int J Adv Manuf Technol 55:921–933
Ghoshal B, Bhattacharyya B (2015) Investigation on profile of microchannel generated by electrochemical micromachining. J Mater Process Technol 222:410–421
Ghoshal B, Bhattacharyya B (2013) Influence of vibration on micro-tool fabrication by electrochemical machining. Int J Mach Tools Manuf 64:49–59
Rathod V, Doloi B, Bhattacharyya B (2015) Influence of electrochemical micromachining parameters during generation of microgrooves. Int J Adv Manuf Technol 76:51–60
Ebeid SJ, Hewidy MS, El-Taweel TA, Youssef AH (2004) Towards higher accuracy for ECM hybridized with low-frequency vibrations using the response surface methodology. J Mater Process Technol 149:432–438
Munda J, Malapati M, Bhattacharyya B (2007) Control of micro-spark and stray-current effect during EMM process. J Mater Process Technol 194:151–158
Bhattacharyya B, Malapati M, Munda J, Sarkar A (2007) Influence of tool vibration on machining performance in electrochemical micro-machining of copper. Int J Mach Tools Manuf 47:335–342
Hewidy MS, Ebeid SJ, El-Taweel TA, Youssef AH (2007) Modelling the performance of ECM assisted by low frequency vibrations. J Mater Process Technol 189:466–472
Yang I, Park MS, Chu CN (2009) Micro ECM with ultrasonic vibrations using a semi-cylindrical tool. Int J Precis Eng Manuf 10:5–10
Zeng YB, Yu Q, Wang SH, Zhu D (2012) Enhancement of mass transport in micro wire electrochemical machining. CIRP Ann-Manuf Technol 61:195–198
Natsu W, Nakayama H, Yu Z (2012) Improvement of ECM characteristics by applying ultrasonic vibration. Int J Precis Eng Manuf 13:1131–1136
Xu L, Pan Y (2014) Electrochemical micromachining using vibrating tool electrode. Int J Adv Manuf Technol 75:645–650
Wang S, Zhu D, Zeng Y, Liu Y (2011) Micro wire electrode electrochemical cutting with low frequency and small amplitude tool vibration. Int J Adv Manuf Technol 53:535–544
Ghoshal B, Bhattacharyya B (2015) Vibration assisted electrochemical micromachining of high aspect ratio micro features. Precis Eng 42:231–241
Wang MH, Zhang Y, He Z, Peng W (2016) Deep micro-hole fabrication in EMM on stainless steel using disk micro-tool assisted by ultrasonic vibration. J Mater Process Technol 229:475–483
Ghoshal B, Bhattacharyya B (2014) Shape control in micro borehole generation by EMM with the assistance of vibration of tool. Precis Eng 38:127–137
Fan ZW, Hourng LW (2011) Electrochemical micro-drilling of deep holes by rotational cathode tools. Int J Adv Manuf Technol 52:555–563
Zhao WS, Wang ZL, Di S, Chi G, Wei Y (2002) Ultrasonic and electric discharge machining to deep and small hole on titanium alloy. J Mater Process Technol 120:101–106
Wang Y, Zeng Y, Qu N, Zhu D (2015) Electrochemical etching of cylindrical nanoprobes using a vibrating electrolyte. Rev Sci Instrum 86:076103
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This work was financially supported by China Postdoctoral Science Foundation (2017M621983) and Zhejiang Provincial Natural Science Foundation (LQ19E050003).
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Wang, Y., Zeng, Y. & Zhang, W. Improving the machining efficiency of electrochemical micromachining with oscillating workpiece. Int J Adv Manuf Technol 102, 2695–2708 (2019). https://doi.org/10.1007/s00170-019-03379-w
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DOI: https://doi.org/10.1007/s00170-019-03379-w