Abstract
A micro electrochemical milling by layer process is presented in this paper. Because of no tool wear in electrochemical micromachining, a very thin tungsten electrode is used as the tool cathode. By applying ultrashort pulses, dissolution of a workpiece can be restricted to the region very close to the electrode. First, the mathematical model of micro electrochemical milling by layer is established to ensure a good shape precision. Second, the micrometer scale cylindrical electrode is fabricated in situ by electrochemical etching for the production of micro structures. And then, effects of machining parameters on the side gap variation in electrochemical milling process have been studied experimentally. Finally, some 2D micro shapes and 3D complex micro structures with physical dimension of several 10 μm have been obtained.
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References
McGeough JA, Leu MC, Rajurkar KP, De Silva AKM, Liu Q (2001) Electroforming process and application to micro/macro manufacturing. Ann CIRP 50(2):499–514
Schuster R, Kirchner V, Allongue P, Ertl G (2000) Electrochemical micromachining. Science 289:98–101
Kim BH, Na CW, Lee YS, Choi DK, Chu CN (2005) Micro electrochemical machining of 3D micro structure using dilute sulfuric acid. Ann CIRP 54(1):191–194
Trimmer AL, Hudson JL, Kock M, Schuster R (2003) Single-step electrochemical machining of complex nanostructures with ultrashort voltage pulses. Appl Phys Lett 82:3327–3329
Lee ES, Baek SY, Cho CR (2005) A study of the characteristics for electrochemical micromachining with ultrashort voltage pulses. Int J Adv Manuf Technol 31:762–769
Kim BH, Ryu SH, Choi DK, Chu CN (2005) Micro electrochemical milling. J Micromech Microeng 15(1):124–129
Lim YM, Kim SH (2001) An electrochemical fabrication method for extremely thin cylindrical micropin. Int J Mach Tools Manuf 41(15):2287–2296
Lim YM, Lim HJ, Liu JR, Kim SH (2003) Fabrication of cylindrical micropins with various diameters using DC current density control. J Mater Process Technol 141:251–255
Liu Y, Zhu D, Zeng YB, Yu HB (2011) Development of micro electrodes for electrochemical micromachining. Int J Adv Manuf Technol 55:195–203
Li Y, Zheng YF, Yang G, Peng LQ (2003) Localized electrochemical micromachining with gap control. Sensors Actuator A 108:144–148
Acknowledgments
This work was financially supported by the Chinese National Natural Science Funds (50635040) and the National High-Tech Research and Development Program (863 Program) (2009AA04Z302).
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Liu, Y., Zhu, D. & Zhu, L. Micro electrochemical milling of complex structures by using in situ fabricated cylindrical electrode. Int J Adv Manuf Technol 60, 977–984 (2012). https://doi.org/10.1007/s00170-011-3682-y
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DOI: https://doi.org/10.1007/s00170-011-3682-y