Abstract
Electrochemical micromachining (EMM) has traditionally been used in highly specialized fields, such as those of the aerospace and defense industries. It is now increasingly being applied in other industries, where parts with difficult-to-cut material, complex geometry and tribology, and devices of microscopic-scale are required. EMM, which is not normally considered as a precision process, is presented in this paper. The application of voltage pulses between a tool electrode and a workpiece in an electrochemical environment allows the three-dimensional machining of conducting materials with micrometer precision. In this paper, tool electrodes (5 μm in diameter, 1 mm in length) are developed by EMM and microholes are manufactured using these tool electrodes. Microholes with a size of below 50 μm in diameter can be accurately achieved by using ultrashort voltage pulses (1–5 μs).
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References
Datta M (1998) Applications of electrochemical microfabrication: an introduction. IBM J Res Develop 42(5):563–575
Rajurkar KP, Zhu D, Wei B (1998) Minimization of machining allowance in electrochemical machining. Annals CIRP 47(1):165–168
McGeough JA (1974) Principles of electrochemical machining. Chapman Hall, London
Rajurkar KP, Zhu D, McGeough JA, Kozak J, De Silva A (2000) New developments in electrochemical machining. ~Annals CIRP 48(2):567–580
Schuster R, Kirchner VV, Allongue P, Ertl G (2000) Electrochemical micromachining. Science 289(5476):98–101
Wei B, Rajurkar KP, Talpallikar S (1997) Identification of interelectrode gap sizes in pulse electrochemical machining. J Electrochem Soc 144(11):3913–3918
In CH, Kim GM, Chu CN (2003) Fabrication of tungsten probe using electrochemical etching. J KSPE 18(2):111–118
Lim YM, Lim HJ, Kim SH (2001) Shape and diameter control of microshafts in electrochemical process. J KSPE 18(5):50–56
Zhu D, Xu HY (2002) Improvement of electrochemical machining accuracy by using dual pole tool. J Mat Proc Tech 129:15–18
Chikamori K (1998) Possibilities of electrochemical micromachining. Int J Jpn Soc Prec Eng 32:37–38
Kim DH, Kang JH, Park KY (2000) Relationship between machining characteristics and current efficiency in electrochemical machining of Ni-Ti shape memory alloy. In: Proceedings of the KSMTE 2000 Fall Annual Meeting, pp 3–21
De Silva AKM, Altena HSJ, McGeough JA (2000) Precision ECM by process characteristic modelling. Annals CIRP 49(1):151–155
Amalnik MS, McGeough JA (1996) Intelligent concurrent manufacturability evaluation of design for electrochemical machining. J Mat Proc Tech 61:130–139
Rajurkar KP, Wei B, Kozak J, McGeough JA (1996) Modeling and monitoring interelectrode gap in pulse electrochemical machining. Annals CIRP 44(1):177–180
Rajurkar KP, Wei B, Kozak J (1993) Study of pulse electrochemical machining characteristics. Annals CIRP 42(1):231–234
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Lee, E.S., Baek, S.Y. & Cho, C.R. A study of the characteristics for electrochemical micromachining with ultrashort voltage pulses. Int J Adv Manuf Technol 31, 762–769 (2007). https://doi.org/10.1007/s00170-005-0247-y
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DOI: https://doi.org/10.1007/s00170-005-0247-y