Abstract
This chapter explains a series of work carried out to implement atomic force microscopy (AFM) capable of operating at frequencies above 1–200 MHz with an amplitude of drive of a few 10–100 pm, both in the deflection and torsional modes. To implement such a microscope, various elements that constitute the AFM were reconsidered from scratch. The issues are; (i) Cantilever, (ii) Cantilever vibration excitation, (iii) Cantilever vibration detection, (iv) AFM head, and (v) Control scheme. The instrumental aspect of the microscope will be discussed in the former half, and the results obtained will be discussed in the latter.
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Kawakatsu, H., Nishida, S., Kobayashi, D., Nakagawa, K., Kawai, S. (2009). High-Frequency Low Amplitude Atomic Force Microscopy. In: Morita, S., Giessibl, F., Wiesendanger, R. (eds) Noncontact Atomic Force Microscopy. NanoScience and Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-01495-6_17
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DOI: https://doi.org/10.1007/978-3-642-01495-6_17
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