Abstract
A new universal function f(x, z) describing electron energy losses over depth ϕ(z) and the lateral distribution of electron energy losses ψ(x) in a scanning electron microscope is developed in the context of a multiple electron scattering model at energies of 1–50 keV in condensed matter, where two groups of backscattered primary electrons are taken into account for the first time.
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N. N. Mikheev, M. A. Stepovich, and E. V. Shirokova, Bull. Russ. Acad. Sci.: Phys. 74 (7), 1002 (2010).
N. N. Mikheev, M. A. Stepovich, and E. V. Shirokova, Bull. Russ. Acad. Sci.: Phys. 76 (9), 974 (2012).
N. N. Mikheev, M. A. Stepovich, and E. V. Shirokova, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 7 (6), 1194 (2013).
N. N. Mikheev, N. A. Nikiforova, and A. S. Ganchev, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 9 (5), 923 (2015).
N. N. Mikheev, M. A. Stepovich, and S. N. Yudina, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 3 (2), 218 (2009).
I. S. Tilinin, Zh. Eksp. Teor. Fiz. 94 (8), 96 (1988).
N. N. Mikheev, V. I. Petrov, and M. A. Stepovich, Izv. Ross. Akad. Nauk, Ser. Fiz. 59 (2), 144 (1995).
V. E. Cosslett and P. N. Thomas, Br. J. Appl. Phys. D 16 (6), 779 (1965).
R. Casteaing and J. Descamps, J. Phys. Radium 16, 304 (1955).
A. Vignes and G. Dez, J. Phys. D: Appl. Phys. 1, 1309 (1968).
N. N. Mikheev, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 8 (5), 916 (2014).
N. N. Mikheev, Poverkhnost, No. 10, 37 (1998).
Q. Oelgart and U. Werner, Phys. Status Solidi A 85 (1), 205 (1984).
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Original Russian Text © N.N. Mikheev, A.S. Kolesnik, 2017, published in Poverkhnost’, 2017, No. 12, pp. 54–61.
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Mikheev, N.N., Kolesnik, A.S. Universal Function of Informative-Signal Generation for Quantitative Methods of Scanning Electron Microscopy. J. Surf. Investig. 11, 1265–1271 (2017). https://doi.org/10.1134/S1027451017050305
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DOI: https://doi.org/10.1134/S1027451017050305