Abstract
In this paper, the sensitive structure of resonant accelerometer is optimized. The working principle of the resonant accelerometer, the sensitive mechanism of the sensitive structure and the mechanical model of the resonant tuning fork are analyzed. Based on these theories, it is answered what influence is the structural parameters of the sensitive structure on the natural frequency of the resonator. Theoretical analysis shows that the root stiffness of the resonator has little effect on the inverse phase vibration frequency, but has a great influence on the in-phase vibration frequency. Therefore, the sensitivity of the resonant accelerometer can be improved by controlling the root rigidity of the tuning fork. Finally, finite element simulation of resonant tuning forks with different root thickness and different root stiffness is carried out. The simulation results are coincided with the theoretical analysis. It is proved that the theoretical analysis is reasonable.
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References
Satchell, D.W., Greenwood, J.C.: A thermally-excited silicon accelerometer. Sens. Actuators 17(1), 241–245 (1989)
He, L., Xu, Y.-P., Qiu, A.: Folded silicon resonant accelerometer with temperature compensation. In: Proceedings of IEEE Sensors, vol. 1, no. 1, pp. 512–515 (2004)
He, L., Xu, Y.-P., Qiu, A.: A COMS readout circuit for silicon resonant accelerometer with 32-ppb bias stability. In: Symposium on VLSI Circuits Digest of Technical Papers, 14–16 June, pp. 146–147 (2007)
He, L., Xu, Y.-P., Palaniapan, M.: A COMS readout circuit for SOI resonant accelerometer with 4-ug bias stability and 20-ug/\( \sqrt {Hz} \) resolution. IEEE J. Solid-State Circuits 43(6), 1480–1490 (2008)
Comi, C., Corigliano, A., Langfelder, G.: A high sensitivity uniaxial resonant accelerometer. In: Proceedings of IEEE MEMS, vol. 33, no. 9, pp. 260–263 (2010)
Wang, Y., Ding, H., Le, X.: A MEMS piezoelectric in-plane resonant accelerometer based on aluminum nitride with two-stage microleverage mechanism. Sens. Actuators A Phys. 254, 126–133 (2017)
Acknowledgments
This study is supported by the National Natural Science Foundation of China under Grant No. 61503018.
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Li, Y., Zhang, Z. (2019). Sensitive Structure Design of Resonant Accelerometer. In: Xhafa, F., Patnaik, S., Tavana, M. (eds) Advances in Intelligent, Interactive Systems and Applications. IISA 2018. Advances in Intelligent Systems and Computing, vol 885. Springer, Cham. https://doi.org/10.1007/978-3-030-02804-6_34
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DOI: https://doi.org/10.1007/978-3-030-02804-6_34
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