Abstract
Atomic force microscopy (AFM)-based nanolithography and nanostructure fabrication have attracted much attention in recent years in nanoscience and nanotechnology. The AFM-based technique has unique abilities such as precise positioning on the patterned surface to be modified, surface measurements (such as topography, friction force, and phase imaging) after the fabrication process, and localized surface characterization (mechanical, electrical, magnetic, and thermal properties) at the nanometer scale. The approaches developed to date can be divided into subtractive processes (such as direct mechanical modification and thermomechanical writing) and additive ones (such as local anodic oxidation and dip pen nanolithography). Employing a catalytically active AFM probe, a novel nanofabrication strategy has also been used to carry out highly localized catalytic chemical reactions to enable the direct and resistless nanoscale patterning and structuring of various organic/inorganic materials. This chapter focuses on the principles and methods of catalytic AFM-based nanofabrication, challenges in its developments, and the possible solutions.
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Shibata, T., Sasano, J., Nagai, M. (2018). Catalytic AFM-Based Nanofabrication. In: Yan, J. (eds) Micro and Nano Fabrication Technology. Micro/Nano Technologies, vol 1. Springer, Singapore. https://doi.org/10.1007/978-981-10-6588-0_27-3
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DOI: https://doi.org/10.1007/978-981-10-6588-0_27-3
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Publisher Name: Springer, Singapore
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Catalytic AFM-Based Nanofabrication- Published:
- 14 June 2018
DOI: https://doi.org/10.1007/978-981-10-6588-0_27-3
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Catalytic AFM-Based Nanofabrication
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- 17 April 2018
DOI: https://doi.org/10.1007/978-981-10-6588-0_27-2
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Catalytic AFM-Based Nanofabrication- Published:
- 08 February 2018
DOI: https://doi.org/10.1007/978-981-10-6588-0_27-1