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Replication of Micro-/Nanostructures

Micro and Nano Fabrication Technology

Part of the book series: Micro/Nano Technologies ((MNT,volume 1))

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Abstract

This chapter is intended to review the state of the art of surface replication technologies related to polymer processing for shaping micro-/nanostructures. The essence of this chapter is presentation of the capability of the high-precision polymer processing technology of micro-/nano-injection molding and micro-/nano-imprinting. Micro-/nano-injection molding is not merely a capability for replication of micro-/nanostructures. This chapter explains that thin-wall products and tiny products can be produced effectively using micro-/nano-injection molding. A discussion of micro-/nano-imprinting emphasizes the progress of plate-to-plate and roll-to-roll methods for thermal and ultraviolet (UV) micro-/nano-imprinting. The explanations of those replication technologies in this chapter mainly address the following details: background and history, current situations and issues, progress in fundamental development, potential for development, and a forecast of future trends of research in this field.

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References

  • Bandić ZZ, Litvinov D, Rooks M (2008) Nanostructured materials in information storage. MRS Bull 33:831–834

    Article  Google Scholar 

  • Chang H, Kim Y (2000) UV–LIGA process for high aspect ratio structure using stress barrier and C–shaped etch hole. Sens Actuators A 84:342–350

    Article  Google Scholar 

  • Chu D, Nemoto A, Ito H (2014) Hydrophobic property of hierarchical polymer surfaces fabricated by precision tooling machine. J Polym Eng 34:1–6

    Article  Google Scholar 

  • Chu D, Nemoto A, Ito H (2015) Biomimetic superhydrophobic polymer surfaces by replication of hierarchical structures fabricated using precision tooling machine and anodized aluminum oxidation. Microsyst Technol 21:123–130

    Article  Google Scholar 

  • Egawa T, Taki K, Ito H et al (2014) Surface replication and higher order structure of amorphous polymer film with nano surface structure fabricated by roll to roll imprinting process. Paper presented at international symposium on fiber science and technology, Tokyo, 29 Sept–1 Oct 2014

    Google Scholar 

  • Giboz J, Copponnex T, Mélé P (2007) Microinjection molding of thermoplastic polymers: a review. J Micromech Microeng 17:R96–R109

    Article  Google Scholar 

  • Holzer C, Gobrecht J, Solak H (2010) Replication of micro– and nanostructures on polymer surfaces. Macromol Symp 296:316–323

    Article  Google Scholar 

  • Ito H, Yagisawa Y, Saito T et al (2005) Structural development in thin–wall injection molding process. Theor Appl Mech Japan 54:263–268

    Google Scholar 

  • Ito H, Kaxama K, Kikutani T (2006) Micro–scale disk in ultra miniature injection molding. SPE ANTEC Tech Paper, Charlotte, May 7–11 2006

    Google Scholar 

  • Ito H, Kazama K, Kikutani T (2007) Surface replication and structural development in micromolding for micro/nanocomposites. Paper presented at the 2007 International manufacturing science and engineering conference (MSEC2007), Atlanta, 15–18 Oct 2007

    Google Scholar 

  • Ito H, Suzuki H, Kikutani T et al (2009) Polymer structure and properties in micro– and nanomolding process. Curr Appl Phys 9:19–24

    Article  Google Scholar 

  • Ito H, Haryu A, Takahagi S et al (2011) Precision polymer nano–molding with anodic aluminum template. SPE ANTEC Tech Paper, Boston, 1–5 May 2011  

    Google Scholar 

  • Jarupoonphol W, Ochiai C, Takai M et al (2002) Prototyping of field emitter array using focused ion and electron beams. Jpn J Appl Phys 41:4311–4313

    Article  Google Scholar 

  • Kaneda R, Takahashi T, Ito H (2016) Optical properties of HDPE in injection molding and injection press molding for IR system lenses. Int Polym Process 31:385–392

    Article  Google Scholar 

  • Kaneda R, Takahashi T, Ito H (2017) Optical properties of HDPE in injection molding and injection press molding for IR system lenses part II: mold temperature and surface roughness effects on injection molding. Int Polym Process 32:237–244

    Article  Google Scholar 

  • Kayano Y, Zouta K, Ito H (2011) Replication properties and structure of PC in micromolding with heat insulator mold using zirconia ceramic. Int Polym Process 26:304–312

    Article  Google Scholar 

  • Kim M, Ha D, Kim T (2015) Cracking–assisted photolithography for mixed–scale patterning and nanofluidic applications. Nat Commun 6:6247. (1–8)

    Article  Google Scholar 

  • Li X (2016) Bactericidal mechanism of nanopatterned surfaces. Phys Chem Chem Phys 18:1311–1316

    Article  Google Scholar 

  • Li Z, Chen Y, Zhu X et al (2016) Fabrication of single–crystal silicon nanotubes with sub–10nm walls using cryogenic inductively coupled plasma reactive ion etching. Nanotechnology 27:365302. (1–9)

    Article  Google Scholar 

  • Lutton REM, Larrañeta E, Kearney M et al (2015) A novel scalable manufacturing process for the production of hydrogel–forming microneedle arrays. Int J Pharm 494:417–429

    Article  Google Scholar 

  • Muanchan P, Kyotani T, Ito H et al (2017) One–dimensional polymer nanofiber arrays with high aspect ratio obtained by thermal nanoimprint method. Polym Eng Sci 57:214–223

    Article  Google Scholar 

  • Naeemi A, Meindl JD (2009) Carbon nanotube interconnects. Annu Rev Mater Res 39:255–275

    Article  Google Scholar 

  • Otmani R, Kandoussi K, Kamal MR et al (2016) Morphology and flow effect of microinjection–molded plastic microgears. Polym Adv Technol 28:511–515

    Article  Google Scholar 

  • Schift H (2008) Nanoimprint lithography: an old story in modern times? A review. J Vac Sci Technol B 26:458–480

    Article  Google Scholar 

  • Schift H, Kristensen A (2010) Nanoimprint lithography – patterning of resists using molding. In: Bhushan B (ed) Springer handbook of nanotechnology. Springer, Berlin/Heidelberg, pp 271–312

    Chapter  Google Scholar 

  • Tada K, Fukuzawa D, Ito H et al (2010) Numerical simulation for flow behaviour on micro– and nanomoulding. Plast Rubber Compos 39:321–326

    Article  Google Scholar 

  • Taki K, Kondo S, Ito H (2016) Effects of UV intensity, line–speed, and light distribution on conversion and surface elastic modulus of roll–to–roll UV–cured film. J Photopolym Sci Technol 29:835–840

    Article  Google Scholar 

  • Taniguchi J, Ito H, Mizuno J, Saito T (eds) (2013) Nanoimprint technology: nanotransfer for thermoplastic and Photocurable polymers. Wiley, Chichester

    Google Scholar 

  • Xia Q, Chou SY (2008) Fabrication of sub–25 nm diameter pillar nanoimprint molds with smooth sidewalls using self–perfection by liquefaction and reactive ion etching. Nanotechnology 19:455301. (1–4)

    Article  Google Scholar 

  • Xie H, Huang H, Peng Y (2017) Rapid fabrication of bio–inspired nanostructure with hydrophobicity and antireflectivity on polystyrene surface replicating from cicada wings. Nanoscale 9:11951–11958

    Article  Google Scholar 

  • Zhang Y, Lu J, Shimano S et al (2007) Nanoimprint of proton exchange membrane for MEMS–based fuel cell application. Paper presented at 6th international IEEE conference on polymers and adhesives in microelectronics and photonics, Odaiba, 15–18 Jan 2007

    Google Scholar 

  • Zhang Y, Lu J, Wang Q et al (2009) Nanoimprint of polymer electrolyte membrane for micro direct methanol fuel cell application. ECS Trans Micro Power Sources 16:11–17

    Google Scholar 

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Correspondence to Hiroshi Ito .

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Muanchan, P., Ito, H. (2018). Replication of Micro-/Nanostructures. In: Yan, J. (eds) Micro and Nano Fabrication Technology. Micro/Nano Technologies, vol 1. Springer, Singapore. https://doi.org/10.1007/978-981-10-6588-0_19-1

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  • DOI: https://doi.org/10.1007/978-981-10-6588-0_19-1

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-10-6588-0

  • Online ISBN: 978-981-10-6588-0

  • eBook Packages: Springer Reference EngineeringReference Module Computer Science and Engineering

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Chapter history

  1. Latest

    Replication of Micro-/Nanostructures
    Published:
    17 April 2018

    DOI: https://doi.org/10.1007/978-981-10-6588-0_19-2

  2. Original

    Replication of Micro-/Nanostructures
    Published:
    13 February 2018

    DOI: https://doi.org/10.1007/978-981-10-6588-0_19-1