Abstract
The literature on the photoetching technique of preparing photoluminescent mesoporous silicon films using both hydrofluoric acid-based and alkali electrolytes is reviewed. The benefits of using an incoherent light source and specific oxidizing agents are highlighted. The technique is particularly useful for creating thin porous regions in n-type Si wafers, SOI wafers, micromachined wafers, or those that contain electronic circuitry
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Adachi S, Kubota T (2007) Light-emitting porous silicon synthesized by photoetching in aqueous HF/I2 solution. Electrochem Solid-State Lett 10:H39–H42
Adachi S, Kubota T (2008) Electroluminescence from porous silicon formed by photoetching in an HF/I2 solution. J Porous Mater 15:427–431
Adachi S, Tomioka K (2005) Visible light emission from porous silicon prepared by photoetching in alkaline solution. Electrochem Solid-State Lett 8:G251–G253
Andersen OK, Frello T, Veje E (1995) Photoinduced synthesis of porous silicon without anodization. J Appl Phys 78:6189–6192
Baranauskas V, Thim GP, Peled A (1995) Laser-induced formation of porous silicon. Appl Surf Sci 86:398–404
Canham LT (1990) Silicon quantum wire array fabricated by electrochemical and chemical dissolution of wafers. Appl Phys Lett 57:103561–103563
Cheah KW, Choy CH (1994) Wavelength dependence in photosynthesis of porous silicon dot. Solid State Commun 91:795–797
Cho IH, Kim DH, Noh DY (2006) Noh, X-ray photochemical wet etching of n-Si (100) in hydrofluoric solution. Appl Phys Lett 89:054104-1-3
Diesinger H, Bsiesy A, Hérino R (2003) Nano-structuring of silicon and porous silicon by photo-etching using near field optics. Phys Status Solidi A 197:561–565
Ferrand P, Romestain R, Vial JC (2001) Photonic band-gap properties of a porous silicon periodic planar waveguide. Phys Rev B 63:115106-1-4
Jones LA, Yükseker Ö, Thomas DF (1996) Dependence of photochemically etched porous silicon formation on photoetching wavelength and power. J Vac Sci Technol A 14:1505–1510
Kolasinski KW, Barnard JC, Ganguly S, Koker L, Wellner A, Aindow M, Palmer RE, Field CN, Hamley PA, Poliakoff M (2000) On the role of the pore filling medium in photoluminescence from photochemically etched porous silicon. J Appl Phys 88:2472–2479
Marotti RE, Quagliata E, Dalchiele EA (2003) Photoluminescence from photochemically etched silicon. Sol Energy Mater Sol Cells 76:263–279
Matsui Y, Adachi S (2012) Optical properties of porous silicon layers formed by electroless photovoltaic etching. ECS J Solid State Sci Technol 1:R80–R85
Mavi HS, Rasheed BG, Soni RK, Abbi SC, Jain KP (2001) Photoluminescence and Raman study of porous silicon synthesized by visible and infrared laser etching. Thin Solid Films 397:125–132
Mavi HS, Prusty S, Kumar M, Kumar R, Shukla AK, Rath S (2006) Formation of Si and Ge quantum structures by laser-induced etching. Phys Status Solidi A 203:2444–2450
Noguchi N, Suemune I (1993) Luminescent porous silicon synthesized by visible light irradiation. Appl Phys Lett 62:1429–1431
Tomioka S, Miyazaki T, Adachi S (2007) Porous silicon formation by photoetching in HF/H2O2 solution using incoherent light source. Jpn J Appl Phys 46:5021–5024
Xu YK, Adachi S (2006) Light-emitting porous silicon formed by photoetching in aqueous HF/KIO3 solution. J Phys D Appl Phys 39:4572–4577
Xu YK, Adachi S (2007) Properties of light-emitting porous silicon photoetched in aqueous HF/FeCl3 solution. J Appl Phys 101:103509-1-5
Xu YK, Adachi S (2008) Properties of light-emitting porous silicon formed by stain etching in HF/KIO3 solution under light illumination. J Appl Phys 103:103512-1-6
Yamamoto N, Takai H (2000) Visible luminescence from photo-chemically etched silicon. Thin Solid Films 359:184–187
Yamamoto N, Takai H (2001) Formation mechanism of silicon based luminescence material using a photo chemical etching method. Thin Solid Films 388:138–142
Zhang Z, Lerner MM, Alekel T III, Keszler DA (1993) Formation of a photoluminescent surface on n-Si by irradiation without an externally applied potential. J Electrochem Soc 140:L97–L98
Zheng HY, Chai JC, Lam YC, Zhu H (2005) Formation of porous structures on Si surface by laser-assisted etching. Surf Rev Lett 12:351–354
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2014 Springer International Publishing Switzerland
About this entry
Cite this entry
Adachi, S. (2014). Porous Silicon Formation by Photoetching. In: Canham, L. (eds) Handbook of Porous Silicon. Springer, Cham. https://doi.org/10.1007/978-3-319-04508-5_6-2
Download citation
DOI: https://doi.org/10.1007/978-3-319-04508-5_6-2
Received:
Accepted:
Published:
Publisher Name: Springer, Cham
Online ISBN: 978-3-319-04508-5
eBook Packages: Springer Reference Chemistry and Mat. ScienceReference Module Physical and Materials ScienceReference Module Chemistry, Materials and Physics
Publish with us
Chapter history
-
Latest
Porous Silicon Formation by Photoetching- Published:
- 27 December 2016
DOI: https://doi.org/10.1007/978-3-319-04508-5_6-3
-
Original
Porous Silicon Formation by Photoetching- Published:
- 23 June 2014
DOI: https://doi.org/10.1007/978-3-319-04508-5_6-2