Abstract
This paper reports measurement of random uncertainties in resonant characteristics (resonance frequency and quality factor) of microelectromechanical system (MEMS) resonators. We employ different methods to extract resonant characteristics of 4 different MEMS resonators which are either clamped-free or clamped-clamped beams. Each beam type operates either in air or in a partial vacuum, and therefore, different vacuum levels can be examined. Three different methods, including frequency sweep, impulse response, and thermal noise, are applied to each resonator type excited with electrostatic or piezo-crystal actuation. We make a thorough analysis and comparison for three different methods. Depending on device type and operating condition, there exists a better and recommended way to extract resonant characteristics of MEMS resonators. For example, the impulse response is best-suited for the quality factor measurement of a clamped-clamped beam operating in a vacuum. Our results show that the quality factor of MEMS resonators may be noticeably different and exhibit appreciable systematic and random uncertainties, and suggests a better way to extract the quality factor for a given situation.
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Recommended by Associate Editor Si-Hyung Lim
Il Lee received his B.S. degree from the Department of Mechanical Engineering at Sogang University in 2012. He is currently working towards his M.S. in the Department of Mechanical Engineering at Sogang University. His research interests include MEMS fabrication and characterization.
Jungchul Lee received his B.S. and M.S. degrees in the Department of Mechanical Engineering from Seoul National University, Seoul, Korea in 2001 and 2003, respectively. He received his Ph.D. degree from the Georgia Institute of Technology in 2007. His dissertation was “Fabrication, Characterization, and Application of Multifunctional Microcantilever Heaters.” During 2007–2008, he worked as a postdoctoral research associate in mechanical science and engineering at the University of Illinois Urbana-Champaign. After spending 2 years (2008–2010) in the Department of Biological Engineering at the Massachusetts Institute of Technology as a postdoctoral research associate, he is now on the faculty in the Department of Mechanical Engineering at Sogang University, Seoul, Korea.
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Lee, I., Lee, J. Measurement uncertainties in resonant characteristics of MEMS resonators. J Mech Sci Technol 27, 491–500 (2013). https://doi.org/10.1007/s12206-012-1269-7
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DOI: https://doi.org/10.1007/s12206-012-1269-7