Abstract
A method to extract a lumped-parameter equivalent circuit for a free-free flexural MEMS resonator, based on the Euler-Bernoulli beam equation and exploiting a modal analysis approach, is presented. The dynamic behaviour predicted by the equivalent circuit is compared with FEM simulations, and the effect of a geometrical mismatch is investigated as well. The resonance frequency and the quality factor are correctly predicted. The method could be used for more complex systems of interconnected beams. The circuit can be used as a quick and intuitive analysis tool for the system-level designer and to allow the simulation of the device in a system-level design environment.
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Fedder, G.K., Jing, Q.: IEEE Trans. Circuits and Systems-II, 46 1309–1315 (1999)
Courtois, B., Karam, J.M., Mir, S., Lubaszewski, M., Szekely, V., Rencz, M., Hofmann, K., Glesner, M.: Proceedings, Twelfth International Conference on VLSI Design, Jan. 10, 270–275 (1999)
Fedder, G.K.: Proceedings, International Workshop on Behavioral Modeling and Simulation, (BMAS 2003), Oct. 7(8), (2003) 64–69
Nguyen, C.T.-C.: Dig. Of Papers, Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, Sep. 12-14. (2001), pp. 23–32
Mattila, T., Kiihamäki, J., Lamminmäki, T., Jaakkola, O., Rantakari, P., Oja, A., Seppä, H., Kattelus, H., Tittonen, I.: Sens. Actuators A, 101, 1–9 (2002)
Lee, S., Demirci, M.U., Nguyen, C.T.-C.: Digest of Technical Papers, the 11th Int. Conf. on Solid-State Sensors & Actuators (Transducers′01), Jun. 10-14. (2001) pp. 1094–1097
Tilmans, H.A.C.: J. Micromech. Microeng. 7, 285–309 (1997)
Bannon, F.D., Clark, J.R., Nguyen, C.T.-C.: J. Solid State Circuits 35, 512–526 (2000)
Paci, D., Nannini, A., Pieri, F.: Symposium on Design, Test, Integration of MEMS/MOEMS (DTIP2005), 1-3 June (2005), pp. 195–199
Hsu, W.-T., Clark, J.R., Nguyen, C.T.-C.: Digest of Technical Papers, the 11th Int. Conf. on Solid-State Sensors & Actuators (Transducers′01), Jun. 10-14. (2001), pp. 1110–1113
Marguerre K., Wolfel, K.: Mechanics of Vibrations. Sijthoff & Noordhoff (1979)
Wang, K., Wong, A.-C., Nguyen, C.T.-C,: IEEE J. Microelectromech. Syst. 9(3), 347–360 (2000)
Fung, Y.C.: Foundations of Solid Mechanics, Prentice Hall (1965)
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Mastrangeli, M., Nannini, A., Paci, D. et al. Equivalent circuit for RF flexural free-free MEMS resonators. J Comput Electron 5, 205–210 (2006). https://doi.org/10.1007/s10825-006-8845-y
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DOI: https://doi.org/10.1007/s10825-006-8845-y