Abstract
Injection molding is regarded as one of the cost-effective molding technologies to produce polymer items in large numbers. In this paper, a fabrication method for nanopillar arrays by combining electroforming and injection molding has been proposed. Mold inserts with satisfactory replication and high homogeneity have been electroformed by a self-designed micro-electroforming equipment. A variotherm injection molding technique with electrical heating and oil cooling has been realized for precise temperature control on mold cavity. It is shown that the mold cavity temperature can be represented by the measured temperature of the thermocouple installed in the mold. Nanopillars are found to be almost filled during the packing stage. Circular structures at the top of nanopillars have been observed under a lower packing pressure. As a key processing parameter, mold temperature is recommended as 25 °C higher than the polymer glass transition temperature. To ensure better replication quality of nano-patterns, the demolding temperature should be around 10 °C lower than the polymer glass transition temperature.
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References
Yang C, Yin XH, Cheng GM (2013) Microinjection molding of microsystem components: new aspects in improving performance. J Micromech Microeng 23:093001
Utko P, Persson F, Kristensen A, Larsen NB (2011) Injection molded nanofluidic chips: fabrication method and functional tests using single-molecule DNA experiments. Lab Chip 11:2303–2308
Chen H, Zhang Q, Chou SY (2015) Patterning of light-extraction nanostructures on sapphire substrates using nanoimprint and ICP etching with different masking materials. Nanotechnology 26:085302
Macintyre D, Thoms S (1998) The fabrication of high resolution features by mould injection. Microelectron Eng 41(2):211–214
Schift H, David C, Gabriel M, Gobrecht J, Heyderman LJ, Kaiser W, Koppel S, Scandella L (2000) Nanoreplication in polymers using hot embossing and injection molding. Microelectron Eng 53(14):171–174
Liou AC, Chen RH (2006) Injection molding of polymer micro-and sub-micron structures with high-aspect ratios. Int J Adv Manuf Technol 28(11–12):1097–1103
Mönkkönen K, Hietala J, Pääkkönen P, Pääkkönen EJ, Kaikuranta T, Pakkanen TT, Jääskeläinen T (2002) Replication of submicron features using amorphous thermoplastics. Polym Eng Sci 42(7):1600–1608
Matschuk M, Larsen NB (2013) Injection molding of high aspect ratio sub-100 nm nanostructures. J Micromech Microeng 23:025003
Menotti S, Hansen HN, Bissacco G, Calaon M, Tang PT, Ravin C (2014) Injection molding of nanopatterned surfaces in the sub-micrometer range with induction heating aid. Int J Adv Manuf Technol 74(5–8):907–916
Lin HY, Chang CH, Young WB (2010) Experimental and analytical study on filling of nano structures in micro injection molding. Int Commun Heat Mass Transfer 37(10):1477–1486
Stormonth-Darling JM, Pedersen RH, How C, Gadegaard N (2014) Injection moulding of ultra high aspect ratio nanostructures using coated polymer tooling. J Micromech Microeng 24:075019
Lin HY, Young WB (2009) Analysis of the filling capability to the microstructures in micro-injection molding. Appl Math Model 33(9):3746–3755
Barbero DR, Saifullah MSM, Hoffmann P, Mathieu HJ, Anderson D, Jones GAC, Welland ME, Steiner U (2007) High-resolution nanoimprinting with a robust and reusable polymer mold. Adv Funct Mater 17(14):2419–2425
Stormonth-Darling JM, Gadegaard N (2012) Injection moulding difficult nanopatterns with hybrid polymer inlays. Macromol Mater Eng 297(11):1075–1080
Keil M, Beck M, Frennesson G, Theander E, Bolmsjo E, Montelius L, Heidari B (2004) Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography. J Vac Sci Technol B 22(6):3283–3287
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Jiang, By., Zhou, My., Weng, C. et al. Fabrication of nanopillar arrays by combining electroforming and injection molding. Int J Adv Manuf Technol 86, 1319–1328 (2016). https://doi.org/10.1007/s00170-015-8260-2
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DOI: https://doi.org/10.1007/s00170-015-8260-2