Abstract
Lever mechanisms are usually used to enlarge output displacements in precision stages. A precision stage employing a lever mechanism and flexure hinges is analyzed theoretically, with bending in the lever considered. Relations between design parameters and magnification ratio, and the optimal values for the parameters to achieve a longer stage displacement are presented. Finite element analysis is used to verify the theoretical analysis. It is found that adjustment of lever dimensions and hinge stiffnesses can increase the stage travel range significantly.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
Callister, J. R. W. D., 2000, “Materials Science and Engineering an Introduction,”John Wiley & Sons, 5th edition, p. 798.
Chang, S. H., Du, B. C., 1998, “A Precision Piezodriven Micropositioner Mechanism with Large Travel range,”Rev. Sci. Instrum. Apr., Vol. 69, No. 4, pp. 1785–1791.
Culpepper, M. L., Anderson, G., 2004, “Design of a Low-Cost Nano-Manipulator Which Utilizes a Monolithic, Spatial Compliant Mechanism,”Prec Eng,Vol. 28, pp. 469–482.
Eseytlin, Y. M., Notch flexure hinges, 2002, “An Effective Theory,”Rev. Sci. Instrum. Sep.,Vol. 73, No. 9, pp. 3363–3368.
Furukawa, E., Mizuno, M., Hojo, T., 1994, “A Twin-Type Piezo-Driven Translation Mechanism,”JSPE, Vol. 28, pp. 70–75.
Paros, J. M., Weisbord, L., 1965, “How to Design Flexure Hinge,”Machine Design, Vol. 37, pp. 151–157.
Ryu, J. W., Gweon, D. G., Moon, K. S., 1997, “Optimal Design of a Flexure Hinge Based XYθ Wafer Stage,”Prec Eng, Vol. 21, No. 1, pp. 18–28.
Smith, S. T., “Flexures: Elements of Elastic Mecha-nisms,”Taylor and Francis, pp. 346–352
Wu, Y., Zhou, Z., 2002, “Design Calculations for Flexure Hinges,”Rev. Sci. Instrum. Aug., Vol. 73, No. 8, pp. 3101–3106.
Xu, W., King, T. G., 1995, “Mechanical Amplifier Design for Piezo-Actuator Applications,”IEEE 1995.yh
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Hwang, E.J., Min, K.S., Song, S.H. et al. Optimal design of a flexure-hinge precision stage with a lever. J Mech Sci Technol 21, 616–623 (2007). https://doi.org/10.1007/BF03026966
Received:
Revised:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/BF03026966