Abstract
The effect of oxygen addition to microwave-sustained plasmas of hexamethyldisiloxane (HMDSO) has been investigated. Attention was directed to the solid products formed on aluminium substrates (plasma deposits). To enable a quantitative analysis of these, X-ray photoelectron spectroscopy (XPS) of standard silicon-containing materials was carried out. When suitable charge correction is applied to the XP spectra of HMDSO/O2 plasma deposits, a number of very clear trends emerge. From changes in elemental composition, core line binding energies (Si2p, C 1s, and O 1s) and widths, we show how oxygen addition to the plasma affects the chemical nature of the plasma deposit. The data reported also provide (some limited) information on the reactions taking place in the plasma.
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References
B. V. Tkachuk, V. V. Bushin, V. M. Kolotyrkim and V. M. Smetankina, Polym. Sci. USSR 9 (1967) 2018.
A. M. Wróbel, J. E. Klemberg, M. R. Wertheimer and H. P. Schreiber, J. Macromol. Sci. Chem. A 15 (1981) 197.
A. K. Hays, Proc. Electrochem. Soc. 82–6 (1982) 75.
M. R. Wertheimer, J. E. Klemberg-Sapieha, H. P. Schreiber, Thin Solid Films 115 (1984) 109.
V. Krishnamurthy, I. A. Kamel and Y. Wei, J. Appl. Polym. Sci. 38 (1989) 605.
Y. M. Tsai, F. J. Boerio, W. J. van Ooij, G. K. Kim and T. Rau, Surf. Inter. Anal., 23 (1995) 261.
P. K. Tien, G. Smolinsky and R. J. Martin, Appl. Opt. 11 (1972) 637.
J. Sakata, M. Yamamoto and M. Hirai, J. Appl. Polym. Sci. 31 (1986) 1999.
H. Yasuda, (ed.), “Plasma Polymerisation”, (Academic Press, London, 1985).
R. d'Agostino (ed.), “Plasma deposition, treatment, and etching of polymers” (Academic Press, 1990).
R. A. Assink, A. K. Hays, R. W. Bild and B. L. Hawkins, J. Vac. Sci. Technol. A3 (1985) 2629.
A. M. Wróbel, J. Macromol. Sci. Chem. A22 (1985) 1089.
M. Gazicki, A. M. Wróbel and M. Krystewski, J. Appl. Polym. Sci. Appl. Polym. Symp. 38 (1984) 1.
Idem,, J. Appl. Polym. Sci. 21 (1977) 2013.
A. M. Wróbel, M. Krystewski and M. Gazicki, J. Macromol. Sci. Chem. A20 (1983) 583.
I. Tajima and M. Yamamoto, J. Polym. Sci. Polym. Chem. Edn 23 (1985) 615.
D. T. Clarke and H. R. Thomas, ibid.— 15 (1977) 283.
G. Beamson and D. Briggs, “High Resolution XPS of Organic Polymers—The Scienta ESCA300 Database” (Wiley, Chichester, 1992) p. 72.
R. J. Ward and B. J. Wood, Surf. Interface Anal. 18 (1992) 679.
P. V. Wright and M. S. Beevers, in “Cyclic Polymers”, edited by J. A. Semlyen (Elsevier Applied Science, Amsterdam 1986) p. 85.
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Alexander, M.R., Short, R.D., Jones, F.R. et al. An X-ray photoelectron spectroscopic investigation into the chemical structure of deposits formed from hexamethyldisiloxane/ oxygen plasmas. Journal of Materials Science 31, 1879–1885 (1996). https://doi.org/10.1007/BF00372203
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DOI: https://doi.org/10.1007/BF00372203