Abstract
A multilayer AIN-W cofired body has been developed using the pressless sintering technique. Effects of additives, such as Y2O3, CaO, La2O3, MgO, Al2O3 and SiO2, on the sheet resistance of W conductor were studied. The sheet resistance of the W conductor increases with increasing additives in the W paste. However, the oxides can be divided into two groups. The effect of the first group on sheet resistance is different from that of the second group.
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Liang, T., Sun, W., Wang, Y.H. et al. Effects of oxide additives on sheet resistance of W thick-film conductor. JOURNAL OF MATERIALS SCIENCE 31, 5159–5161 (1996). https://doi.org/10.1007/BF00355919
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DOI: https://doi.org/10.1007/BF00355919