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Plasma-Enhanced Chemical Vapor Deposition

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Advanced Techniques for Surface Engineering

Part of the book series: Eurocourses: Mechanical and Materials Science ((EUMM,volume 1))

Abstract

The basic principles of Plasma-Enhanced Chemical Vapor Deposition processes are examined along with reactor architectures. Emphasis is given to the chemistry of the discharge and to active species and deposition precursors with the aim of correlating film compositions with discharge internal parameters. The processes for the deposition of films of fluoropolymers, metal containing polymers, SiO2-likes and silicone-likes are examined as case studies.

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References

  1. d’ Agostino R., Cramarossa F., Fracassi F., Illuzzi F., Caporiccio G., European Patent Application no. 230993 (1987).

    Google Scholar 

  2. d’ Agostino R., Cramarossa F., Fracassi F., De Simoni E., Sabbatini L., Zambonin P.G., Caporiccio G., Thin Solid Film, 143, 163, (1986).

    Article  Google Scholar 

  3. Lamendola R., Favia P., d’Agostino R., submitted for publication.

    Google Scholar 

  4. d’ Agostino R., Capezzuto P., Bruno G., Cramarossa F., Pure Appl. Chem., 57, 1287, (1985).

    Article  Google Scholar 

  5. Yasuda H.K. in: “Thin Film Processes”, Vossen J.L., Kern W. eds., Academic Press, (1978), and refs therein.

    Google Scholar 

  6. d’Agostino R., unpublished results.

    Google Scholar 

  7. Yasuda H.K.: “Plasma Polymerization”, Academic Press (1985).

    Google Scholar 

  8. Kammermaier J., Rittmayer G., Schulte R., Proc. of the 6th Int. Symp. on Plasma Chemistry ISPC-6, Montreal, (1983).

    Google Scholar 

  9. Kammermaier J., Rittmayer G., Proc. of the 7th Int. Symp. on Plasma Chemistry ISPC-7, Eindhoven, (1985).

    Google Scholar 

  10. Carmi U., Inspector A., Avni R., Plasma Chem. Plasma Proc., 1, 233 (1981).

    Article  CAS  Google Scholar 

  11. Claude R., Moisan M., Wertheimer M.R., Zakrzewski Z. in “Polymeric Materials Science and Engineering”, Shen M., Bell A.T. eds., Proc. of the ACS Division of Polymeric Materials, 56, Denver, (1987).

    Google Scholar 

  12. Claude R., Moisan M., Wertheimer M.R., Zakrzewski Z., Appl. Phys. Lett., 50, 1797 (1987).

    Article  CAS  Google Scholar 

  13. Claude R., Moisan M., Wertheimer M.R., Zakrzewski Z., Plasma Chem. Plasma Proc., 7, 451 (1987).

    Article  CAS  Google Scholar 

  14. Wertheimer M.R., Moisan M., J. Vac. Sci. Technol., A3, 2643 (1985).

    CAS  Google Scholar 

  15. Ferreira C.M., J. Louriero, J. Phys. D., 17, 1175 (1984).

    Article  CAS  Google Scholar 

  16. Vossen J.L., Electrochem. Soc., 126, 1308 (1978).

    Google Scholar 

  17. Yasuda H., Hsu T., Surface Science, 76, 232 (1978).

    Article  CAS  Google Scholar 

  18. Rice D.W., O’ Kane D.F., J. Electrochem. Soc., 123, 1308 (1976).

    Article  CAS  Google Scholar 

  19. Ohki Y., Nakano T., Yahagi K., Proc. of the 7th Int. Symp. on Plasma Chemistry ISPC-7, Eindhoven, (1985).

    Google Scholar 

  20. Koenig H.R., Maissel L.1., IBN J. Res. Develop., 14, 168 (1970).

    Google Scholar 

  21. Coburn J.W., Kay E., J. Appl. Phys., 43, 4965 (1972).

    Article  CAS  Google Scholar 

  22. Koler K., Coburn J.W., Home D.E., Kay E., Keller J.H., J. Appl. Phys., 57, 59 (1985).

    Article  Google Scholar 

  23. Bruce R.H., J. Appl. Phys., 52, 7064 (1981).

    Article  CAS  Google Scholar 

  24. Coburn J.W., Winters H.F., J. Vac. Technol., 16, 391 (1979).

    Article  CAS  Google Scholar 

  25. Fracassi F., Occhiello E., Coburn J.W., J. Appl. Phys., 62, 3980 (1987).

    Article  CAS  Google Scholar 

  26. Christensen O., Jensen P., J. Phys. E, 5, 86 (1972).

    Article  CAS  Google Scholar 

  27. d’ Agostino R., Cramarossa F., Fracassi F., Illuzzi F. in: “Plasma Deposition, Treatment and Etching of Polymer Films”, R. d’Agostino ed., Academic Press (1990).

    Google Scholar 

  28. Fracassi F., Coburn J.W., J. Appl. Phys. 63 (5), 1 (1988).

    Article  Google Scholar 

  29. d’ Agostino R., Favia P., Fracassi F., J. Pol. Sci. A: Pol. Chem., 28, 3387, (1990).

    Article  Google Scholar 

  30. d’ Agostino R., Cramarossa F., De Benedictis S., Plasma Chem. Plasma Proc., 2, 213 (1982).

    Article  Google Scholar 

  31. d’ Agostino R., Cramarossa F., De Benedictis S., Fracassi F., Plasma Chem. Plasma Proc., 4, 163 (1984).

    Article  Google Scholar 

  32. d’ Agostino R., Cramarossa F., Fracassi F., Laska L., Masek K., Plasma Chem. Plasma Proc., 5, 239 (1985).

    Article  Google Scholar 

  33. d’Agostino R., De Benedictis S., Cramarossa F., Plasma Chem. Plasma Proc., 4, 1 (1982).

    Article  Google Scholar 

  34. d’Agostino R., Colaprico V., Cramarossa F., Plasma Chem. Plasma Proc., 1, 365 (1981).

    Article  Google Scholar 

  35. Donnelly V.M., Flamm D.L., Doutremont-Smith W.C., Werder D.J., J. Appl. Phys. 55, 5974 (1984).

    Article  Google Scholar 

  36. Coburn J.W., Winters H.F., J. Vac. Sci. Techn., 16, 391 (1979); Kay E., Coburn J.W., Dilks A., in: “Topics in Current Chemistry”, Veprek S., Venugopalan M. eds., Plasma Chemistry III, 94, Springer-Verlag, Berlin, (1980).

    Google Scholar 

  37. Pittman A.G., in “Fluoropolymers” (L.A. Wall ed.), Wiley, New York, (1972).

    Google Scholar 

  38. Momose Y., Takada T., Okagaki S, in: “Polymeric Materials Science and Engineering”, Shen M., Bell A.T. eds., Proc. of ACS Division of Polymeric Materials, 56, Denver, (1987).

    Google Scholar 

  39. Coburn J.W., Chen M.J. Appl. Phys., 51, 3134 (1980).

    Article  CAS  Google Scholar 

  40. d’Agostino R., Cramarossa F., De Benedictis S., Ferraro G., J. Appl. Phys., 52, 1259 (1981).

    Article  Google Scholar 

  41. d’Agostino R., Cramarossa F., De Benedictis S., Fracassi F., Plasma Chem. Plasma Proc., 4, 163 (1984).

    Article  Google Scholar 

  42. d’Agostino R., Cramarossa F., Colaprico V., Plasma Chem. Plasma Proc., 1, 365 (1981).

    Article  Google Scholar 

  43. d’Agostino R., Cramarossa F., De Benedictis S., Plasma Chem. Plasma Proc., 4, 21 (1984).

    Article  Google Scholar 

  44. d’ Agostino R., Cramarossa F., Illuzzi F., J. Appl. Phys., 61, 2754 (1987).

    Article  Google Scholar 

  45. d’Agostino R., Proc. of XVI ICPIG, invited, Dusseldorf, (1983).

    Google Scholar 

  46. Dilks A. in: “XPS for Investigation of Polymeric Materials”, Brundle C.R., Baker A.D. eds., Electron Spectroscopy 4, Acad. Press, London, (1981).

    Google Scholar 

  47. Clark D.T., in: “ESCA Applied to Organic and Polymeric Systems”, Briggs D., ed., Handbook of X-ray and UV Photoelectron Spectroscopy, Heydem, London, (1978).

    Google Scholar 

  48. Dilks A., Kay E., Macromolecules, 14, 855 (1980).

    Article  Google Scholar 

  49. Kay E., Z. Phys. D, 3, 251 (1986).

    CAS  Google Scholar 

  50. Biederman H., Vacuum, 37, 367 (1987).

    Article  CAS  Google Scholar 

  51. Biederman H., Martinu L., Slavinska D., Chudacek I., Pure Appl. Chem. 60, 607 (1988).

    Article  CAS  Google Scholar 

  52. Kay E., Dilks A., Hetzler U., Macromol. Chem. A, 12, 1393 (1978).

    Article  Google Scholar 

  53. d’Agostino R., Martinu L., Pische V., Proc. of 9th Int. Symp. on Plasma Chemistry ISPC-9, Pugnochiuso, Italy, (1989).

    Google Scholar 

  54. Martinu L., Biederman H., Plasma Chem. Plasma Proc., 5, 81 (1985).

    Article  CAS  Google Scholar 

  55. Martinu L., Spatenka P., Biederman H., Sicha M., Thin Solid Films, 141, L83 (1986).

    Article  CAS  Google Scholar 

  56. Kay E., Coburn J., Dilks A., in: “Topics in Current Chemistry”, 94, 1 (1981).

    Google Scholar 

  57. Martinu L., Biederman H., Vacuum, 36, 477 (1986).

    CAS  Google Scholar 

  58. Martinu L., Solar Energy Materials, 15, 135 (1987).

    Article  CAS  Google Scholar 

  59. Perrin J., Despax B., Hanchett V., Kay E., J. Vac. Sci. Tech. A, 4, 46 (1986).

    CAS  Google Scholar 

  60. Beale H.A., Ind. Res. Develop., 23, 135 (1981).

    CAS  Google Scholar 

  61. Biederman H., Vacuum, 34, 405 (1984).

    Article  CAS  Google Scholar 

  62. Mannini A., Bagnoli P., Diligenti A., Neri B., Pugliese S., J. Appl. Phys., 62, 2138 (1987).

    Article  Google Scholar 

  63. Morita S., Hattori S., Pure Appl. Chem., 57, 1277 (1985).

    Article  CAS  Google Scholar 

  64. Hori M., Yasuda T., Yamada H., Morita S., Hattori S., Plasma Chem. Plasma Proc., 7, 155 (1987).

    Article  CAS  Google Scholar 

  65. Kay E., Proc. E-MRS Meeting, 15, 355, (1987).

    Google Scholar 

  66. A. M. Wrobel, M. R. Wertheimer in: “Plasma Deposition, Treatment, and Etching of Polymers”, R. d’Agostino ed., Acad. Press (1990) and refs. therein.

    Google Scholar 

  67. Favia P., Colaprico V., Fracassi F., De Santis C., d’Agostino R., Proc. of the Meeting on Sintesi e Metodologie Speciali in Chimica Inorganica, Bressanone, Italy (1991).

    Google Scholar 

  68. Fracassi F., Favia P., d’Agostino, J. of Electrochem. Soc., in press.

    Google Scholar 

  69. Favia P., Fracassi F., d’Agostino R., J. Biomat. Sci.: Polym. Eds., in press.

    Google Scholar 

  70. Favia P., Lamendola R., d’Agostino R., Plasma Sour. Sci. Tech., 1, 59 (1992).

    CAS  Google Scholar 

  71. Favia P. Caporiccio G., d’Agostino R., work in preparation.

    Google Scholar 

  72. Favia P, Fracassi F, d’Agostino R, Proc. of 9th Symp on Elementary Processes and Chemical Reactions in Low Pressure Plasma, invited, Casta (Czekoslovakia), (1992).

    Google Scholar 

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Author information

Authors and Affiliations

  1. Centro di Studio per la Chimica dei Plasmi, CNR Department of Chemistry, University of Bari, 4, Trav. Re David 200, 70126, Bari, Italy

    R. d’Agostino, P. Favia, F. Fracassi & R. Lamendola

Authors
  1. R. d’Agostino
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  2. P. Favia
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  3. F. Fracassi
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  4. R. Lamendola
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Editor information

Editors and Affiliations

  1. Institute for Advanced Materials, Joint Research Centre, Commission of the European Communities, Ispra, Italy

    Wolfram Gissler

  2. Forschungsinstitut für Edelmetalle und Metallchemie, Schwäbisch Gmünd, Germany

    Hermann A. Jehn

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© 1992 Springer Science+Business Media Dordrecht

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d’Agostino, R., Favia, P., Fracassi, F., Lamendola, R. (1992). Plasma-Enhanced Chemical Vapor Deposition. In: Gissler, W., Jehn, H.A. (eds) Advanced Techniques for Surface Engineering. Eurocourses: Mechanical and Materials Science, vol 1. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-0631-5_6

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  • DOI: https://doi.org/10.1007/978-94-017-0631-5_6

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-90-481-4214-9

  • Online ISBN: 978-94-017-0631-5

  • eBook Packages: Springer Book Archive

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