Abstract
Most nitrides have a relative permittivity (ε r) of ~10 at low frequencies and low temperature, but resistivities which vary from 10 to 1012 Ωcm at ambient conditions. The stability of many nitride ceramics at elevated temperature makes them attractive as dielectrics in harsh environments. The main trends in the published dielectric data are outlined, and discussed in detail for Si3N4-based ceramics. New data are presented for the electrical resistivity, relative permittivity, loss factor and breakdown strength of AlN and Si3N4 ceramics, and Si3N4-A1N ceramic composites. The effect of microstructural features on dielectric properties are discussed.
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References
Riley, F.L. (1983) ‘Progress in Nitrogen Ceramics (Nijhoff Publishers, The Hague) NATO ASI, Series E No. 65.
Frederiske, H.P.R., Kahn, A.H. and Dragoo, A.L. (1985) J. Amer. Ceram. Soc. 63, 131–135.
Clark, D.R. and Ho, W.W. (1983), Advances in Ceramics, 7, 246–252.
Morosanu, C.E. (1980) Thin Solid Films, 65, 171.
Buchanan, R.C. (1986) Ceramic Materials for Electronics (Marcel Dekker Inc., New York).
Sharif, R.I., Thorp, J.S. and Kavanagh, S.A. (1981) J. Mater. Sei., 16, 211–220.
Hagen, S.H. and Kapteyns, C.J. (1970) Philips Res. Repts., 25, 1.
Hudson, A.R. (1963) UPA patent 309087, May 21.
Phillips, J.C. (1973) Bonds and bands in semicondcutors, (Academic Press N.Y.).
Gladkii, V.V. and Zheludey, I.S. (1968) Soviet Phys. Crystal (Engl. Trans.) 12, 788.
Franz, I. and Langherinrich, W. (1971) Solid State Electron, 14, p. 499 and p. 835.
Thorp, J.S. and Sharif, R.I. (1977) J. Mater. Sri., 12, 2274.
Thorp, J.S., Ahmed, A.B., Kulesza, B.L.J. and Bushell, T.G. (1984) J. Mater. Sci., 19, 3680–3686.
Walton, J.D. (1974) Am. Ceram. Soc. Bull., 53, 255.
Perry, G.S. and Moules, T.R. (1974) Proc. 12th Symposium on Electromagnetic Windows (Georgia Institute of Technology, Atlanta) Ed. J.N. Harris.
Messier, D.R. and Wong, P. (1976) Proc. 13th Symposium on Electromagnetic Windows (Georgia Institute of Technology, Atlanta) Ed. J.N. Harris.
Perera, D.S., Thompson, D.P. and Thorp, J.S. (1988) Br. Ceram. Proc., 41, 93–100.
Thorp, J.S. and Kenmuir, S.V.J. (1981) J. Mater. Sci., 16 Letters, 1407–9.
Jack, K. (1976) J. Mater. Sci., 11, 1135.
Thorp, J.S., Bushell, T.G., Evans, D. and Rad, N.E. (1987), J. Mater.Sci., 22, 2641–2644.
Korman, R. and Zuppiroli, L. (1985) Proc. Int. Conf. on Phys. and Chem. of Boron-rich Borides (Albuquerque, USA, 1985) AIP Conf. Proc. 140, 216.
Werheit, H. (1990) On the electronic. transport properties of boron carbide — this volume.
Koops, G.C. (1951) Phys. Rev., 83, 121.
Dissado, L.A. and Hill, R.M. (1980) Philos. Mag. B41, 625.
Jonscher, A.K. (1981) J. Mater. Sei. 16, 2037.
Kenmuir, S.J.V., Thorp, J.S. and Kulesza, B.L.J. (1983) J. Mater. Sci., 18, 1725.
Jonscher, A.K. (1978) Philos. Mag., 838, 587.
Jonscher, A.K. (1977) Nature, 267, 673.
Davis, R.F. (1990) Current status of the research on III-V mononitride thin films for electronic and optoelectronic applications — this volume.
Owate, I.O. and Freer, R. (1988) Science of Ceramics, 14, 1013–1018.
Owate, I.O. and Freer, R. (1989) Silicate Industriels, 7–8, 123–127.
Sun, W.Y., Thompson, D.P.T. and Jack, K. (1986) Proceedings of seminar ‘Tailoring Multiphase and Composite Ceramics’, (Pennsylvania State University 1985) Eds. R.E. Tressler et al, Materials Science Research, 20, 93.
Zeller, H.P. (1987) IEEE Trans. on Elec. Insul. E1–22, 115.
Morse, C.T. and Hill, G.J. (1970), Proc. Br. Ceram. Soc., 18, 23.
Byoung-Chul, S. and Ho-Gi, K. (1988) Science of Ceramics, 14, 997.
Braddeau, P., Cales, B. and Torre, J.P. (1988) Science of Ceramics, 14, 413.
McCarthy, J.P., Pedder, D.J. and Brierly, C.J. (1984) Allen Clark Research Centre Annual Review, 105–112.
Morrell, R. Handbook of Properties of Technical. and Engineering Ceramics, Data Review, Section on Si3N4 (unpublished).
Morrell, R. (1987) Handbook of Properties of Technical and Engineering Ceramics, Part 2, Data Reviews, Section 1 (NPL, UK).
Partridge, G., Elyard, C.A. and Budd, M.I. (1989) Glasses and Glass Ceramics (Chapman and Hall, UK) Ed. M.H. Lewis, p. 226.
Onn, D. (1987) personal communication.
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Freer, R., Owate, I.O. (1990). The Dielectric Properties of Nitrides. In: Freer, R. (eds) The Physics and Chemistry of Carbides, Nitrides and Borides. NATO ASI Series, vol 185. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-2101-6_36
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DOI: https://doi.org/10.1007/978-94-009-2101-6_36
Publisher Name: Springer, Dordrecht
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