Abstract
Macro-micro dual-drive positioning stage has particularly good potential application in high acceleration and high precision positioning stage using for IC packaging. In this paper, the positioning stage which is composed by VCM (voice coil motor) as macro driver and PZT as micro driver is used. Coupling characters of the stage are discussed by analyzing dynamic model firstly, then models of macro drive positioning stage and micro drive positioning stage are built separately which both contain mechanism and driver part. Finally, a control structure, micro drive positioning stage dynamic compensate the positioning error produced by macro drive positioning stage, is proposed, in this control structure, LQG control method is used to control macro drive positioning stage, and PID control method is used to control the micro drive positioning stage. Detailed designs are conducted for the proposed approach, and the simulation results demonstrate the good performance of the proposed controller.
Access provided by Autonomous University of Puebla. Download to read the full chapter text
Chapter PDF
Similar content being viewed by others
References
Sangjoo, K., Wan, K.C., Youngil, Y.: On the Coarse/Fine Dual-stage Manipulators with Perturbation Compensator. In: The 2001 IEEE International Conference on Robotics & Automation, Seoul, Korea, pp. 121–126 (2001)
Heui, J.P., Dong, S.L., Jong, H.P.: Ultra Precision Positioning System for Servo Motor-piezo Actuator Using the Dual Loop and Digital Filter Implementation. International Journal of Machine Tool & Manufacture 41, 51–63 (2001)
Sharon, A.: The Macro/Micro Manipulator: An Improved Architecture for Robot Control. Degree of Doctor of Philosophy, Thesis, Mechanical Engineering Department, Massachusetts Institute of Technology (1988)
Khatib, O.: Reduced effective inertia in macro-mini Manipulator Systems. In: Fifth Int. Symp. on Robotics Research, pp. 279–284 (1990)
Li, Y., Marcassa, F., Horowitz, R., Oboe, R.: Track following control with active vibration damping of a PZT actuated suspension dual-stage servo system. In: Proc. Am. Control Conf., pp. 2553–2559 (2003)
Huang, X., Horowitz, R., Li, Y.: Track-following control with active vibration damping and compensation of a dual-stage servo system. Microsyst. Technol. 11, 1276–1286 (2005)
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2008 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Liu, Y., Li, T., Sun, L. (2008). Modeling and Control of Macro-micro Dual-Drive High Acceleration and High Precision Positioning Stage Using for IC Packaging. In: Xiong, C., Liu, H., Huang, Y., Xiong, Y. (eds) Intelligent Robotics and Applications. ICIRA 2008. Lecture Notes in Computer Science(), vol 5315. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-88518-4_30
Download citation
DOI: https://doi.org/10.1007/978-3-540-88518-4_30
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-88516-0
Online ISBN: 978-3-540-88518-4
eBook Packages: Computer ScienceComputer Science (R0)