This chapter describes the diffraction theory relationships between figure errors of grazing incidence mirrors and their imaging performance at synchrotron radiation beam lines. A practical illustrative example is the topographic errors of a synchrotron mirror as a function of spatial frequency. The basic idea of figure error inspection by direct slope measurement is described.
Access provided by Autonomous University of Puebla. Download to read the full chapter text
Chapter PDF
Similar content being viewed by others
Keywords
- Spatial Frequency
- Optical Element
- Grazing Incidence
- Power Spectral Density Function
- Synchrotron Radiation Beam
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
References
J.S. Taylor, G.E. Sommargren, D.W. Sweeney, R.M. Hudyama, UCRL-JC-128290 Rev. 1 (1998)
E.L. Church, P.Z. Takacs, Opt. Eng. 34(2), 353 (1995)
E.L. Church, P.Z. Takacs, Appl. Optics 32(19), 3344 (1993)
V.V. Yashchuk, M.R. Howells, W.R. McKinney, P.Z. Takacs, in Proceedings of The 3rd International Workshop on Metrology for X-Ray Optics, Daegu, 2006
V.V. Yashchuk, S.C. Irick, E.M. Gullikson, M.R. Howells, A.A. MacDowell, W.R. McKinney, F. Salmassi, T. Warwick, in Advances in Metrology for X-Ray and EUV Optics, ed. by L. Assoufid, P.Z. Takacs, J.S. Taylor, Proceedings of SPIE, vol. 5921, 2005, p. 18
P. Takacs, S. Qian, J. Colbert, SPIE 749, 59 (1987)
P.Z. Takacs, S.-N. Qian, United States Patent 4,884,697, 1989
F. Siewert, T. Noll, T. Schlegel, T. Zeschke, H. Lammert, in AIP Conference Proceedings, vol. 705, Mellvile, New York, 2004, p. 847
H. Lammert, T. Noll, T. Schlegel, F. Siewert, T. Zeschke, in Patentschrift DE10303659 B4 2005.07.28
I. Weingärtner, M. Schulz, C. Elster, in Proceedings of SPIE, vol. 3782, 1999, p. 306
C. Elster, I. Weingärtner, Appl. Opt. 38, 5024 (1999)
V.V. Yashchuk, S.C. Irick, E.M. Gullikson, M.R. Howells, A.A. MacDowell, W.R. McKinney, F. Salmassi, T. Warwick, Advances in Metrology for X-Ray and EUV Optics, ed. by L. Assoufid, P.Z. Takacs, J.S. Taylor, Proceedings of SPIE, vol. 5921, 2005, p. 18
S.C. Irick, Rev. Sci. Instrum. 63(1), (1992)
R. Signorato, M. Sanchez del Rio, in Proceedings of SPIE, vol. 3152, 1997, p. 136
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2008 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Siewert, F. (2008). Slope Error and Surface Roughness. In: Erko, A., Idir, M., Krist, T., Michette, A.G. (eds) Modern Developments in X-Ray and Neutron Optics. Springer Series in optical science, vol 137. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-74561-7_9
Download citation
DOI: https://doi.org/10.1007/978-3-540-74561-7_9
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-74560-0
Online ISBN: 978-3-540-74561-7
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)