A research project, involving both metrologists and manufacturers has made it possible to manufacture optical components beyond the former limit of 0.5 ?rad in the root mean square (rms) slope error. To enable the surface finishing, by polishing and finally by ion beam figuring, of optical components characterized by a rms slope error in the range of 0.2 μrad, it is essential that the optical surface be mapped and the resulting data used as input for the ion beam figuring. In this chapter the results of metrology supported surface optimization by ion beam figuring will be discussed in detail. The improvement of beam line performance by the use of such high quality optical elements is demonstrated by the first results of beam line commissioning.
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References
F. Siewert, H. Lammert, G. Reichardt, U. Hahn, R. Treusch, R. Reininger, in AIP Conference Proceedings, Mellville, New York, 2006
L. Assooufid, O. Hignette, M. Howells, S. Irick, H. Lammert, P. Takacs, Nucl. Instrum. Methods Phys. Res. A 467–468, 399 (2000)
A. Schindler, T. Haensel, A. Nickel, H.-J. Thomas, H. Lammert, F. Siewert, Finishing procedure for high performance synchrotron optics, in Proceedings of SPIE, 5180, 64 (2003)
T. Hänsel, A. Nickel, A. Schindler, H.J. Thomas, in Frontiers in Optics, OSA Technical Digest (CD) (Optical Society of America, 2004), paper OMD5
H. Lammert, T. Noll, T. Schlegel, F. Senf, F. Siewert, T. Zeschke, Breakthrough in the Metrology and Manufacture of Optical Components for Synchrotron Radiation, BESSY Annual Report 2003, www.bessy.de, Berlin, 2004
F. Siewert, K. Godehusen, H. Lammert, T. Schlegel, F. Senf, T. Zeschke, T. Hänsel, A. Nickel, A. Schindler, NOM measurement supported ion beam finishing of a plane-elliptical refocussing mirror for the UE52-SGM1 beamline at BESSY , BESSY Annual Report 2003, www.bessy.de, Berlin, 2004
F. Siewert, H. Lammert, T. Noll, T. Schlegel, T. Zeschke, T. Hänsel, A. Nickel, A. Schindler, B. Grubert, C. Schlewitt, in Advances in Metrology for X-Ray and EUV-Optics, Proc. of SPIE, vol. 5921, 2005, p. 592101
K. Holldack, T. Zeschke, F. Senf, C. Jung, R. Follath, D. Ponwitz, A Microfocus Imaging System, BESSY Annual Report, www.bessy.de, Berlin 2000, pp. 336–338
H. Lammert, NOK-NOM-Schlussbericht, Nanometer-Optikkomponenten für die Synchrotronstrahlung, Messen und Endbearbeitung bis in den Subnanometer-Bereich unter λ∕1000, Berlin, 2004. TIB Hannover: http://edok01.tib.uni-hannover.de/edoks/e01fb05/500757100.pdf
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Siewert, F., Lammert, H., Zeschke, T., Hänsel, T., Nickel, A., Schindler, A. (2008). Shape Optimization of High Performance X-Ray Optics. In: Erko, A., Idir, M., Krist, T., Michette, A.G. (eds) Modern Developments in X-Ray and Neutron Optics. Springer Series in optical science, vol 137. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-74561-7_12
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