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Keywords
- Piezoelectric Layer
- Bulk Acoustic Wave
- Philips Research Laboratory
- IEEE Ultrasonics Symposium
- Bulk Acoustic Wave Resonator
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References
K.M. Lakin, G.R. Kline, K.T. McCarron, High Q microwave acoustic resonators and filters. IEEE Transactions on Microwave Theory a. Techniques, 41, 2139 (1993).
K.M. Lakin, J. Belsick, J.F. McDonald, and K.T. McCarron, High Performance Stacked Crystal Filters for GPS and Wide Bandwidth Applications, 2001 IEEE Ultrasonics Symposium Atlanta, p. 833, 2001.
R.C. Ruby, P. Bradley (SM), Y. Oshmyansky, A. Chien, Thin Film Bulk Wave Acoustic Resonators (FBAR) for Wireless Applications, 2001 IEEE Ultrasonics Symposium Atlanta, p. 833, 2001.
K.M. Lakin, G.R. Kline, K.T. McCarron, Development of miniature filters for wireless applications, IEEE Transactions on Microwave Theory a. Techniques, 43, 2933 (1995).
J.D. Larson III, R. Ruby, P. Bradley, Y. Oshmyansky, A BAW antenna duplexer for the 1900MHz PCS band. 1999 IEEE Ultrasonics Symposium Lake Tahoe, p. 887, 1999.
K.M. Lakin, K.T. McCarron, J. Belsick, R. Rose, Filter Banks Implemented with Integrated Thin Film Resonators, 2000 IEEE Ultrasonics Symposium, Puerto Rico, p. 851, 2000.
H.P. Löbl, M. Klee, R. Milsom, R. Dekker, C. Metzmacher, W. Brand, P. Lok, Materials for bulk acoustic wave (BAW) resonators and filters, Conference on Microwave Materials and their Applications MMA2000, Bled, Slovenia, September 2000, Journal of the European Ceramic Society, 21, 2633, (2001).
H.P. Löbl, M. Klee, O. Wunnicke, R. Kiewitt, R. Dekker, E.v. Pelt, Piezoelectric AlN and PZT films for micro-electronic applications. 1999 IEEE Ultrasonics Symposium Lake Tahoe, p. 1031, 1999.
Piezoelectric Materials for BAW Resonators and Filters, H.P. Lobl, M. Klee, C. Metzmacher, W. Brand, R. Milsom, P. Lok, F. van Straten 2001 IEEE Ultrasonics Symposium Atlanta, p. 807, 2001.
H. Nowotny, E. Benes, General one-dimensional treatment of the layered piezoelectric resonator with two electrodes, J. Acoust. Soc. Am., 82, 513 (1987).
H.P. Löbl, M. Klee, C. Metzmacher, W. Brand, R. Milsom, P. Lok, Piezoelectric Thin ALN Films for Bulk Acoustic Wave (BAW) Resonators, in Proceedings (SSMM) of the Asia Pacific Microwave Conference APMC 2001, Taipei, p. 37–42, 2001 and in Materials Science a. Engineering 9532, 1 (2002).
J.D. Larson, P. Bradley, S. Wartenberg, R.C. Ruby, Modified Butterworth-Van Dyke Circuit for FBAR Resonators and Automated Measurement System, 2000 IEEE Ultrasonics Symposium, Puerto Rico, p. 865, 2000.
R.F. Milsom, H.P. Löbl, D.N. Peligrad, J.W. Lobeek, A. Tuinhout, H.J. ten Dolle, Combined Acoustic Electromagnetic Simulation of Thin Film Bulk Acoustic Wave Filters, 2002 IEEE Ultrasonics Symposium Munich, proceedings, p. 963, 2002.
H.P. Loebl, C. Metzmacher, D.N. Peligrad, R. Mauczok, M. Klee, W. Brand, R.F. Milsom, P. Lok, F. van Straten, A. Tuinhout, J.W. Lobeek, Solidly Mounted Bulk Acoustic Wave Filters for the GHz Frequency Range, 2002 IEEE Ultrasonics Symposium Munich, proceedings, p. 897, 2002.
P.D. Bradley, SM, R. Ruby, A. Barfknecht, F. Geefay, C. Han, G. Gan, Y. Oshmyansky, A 5 mm × 5 mm × 1.37 mm Hermetic FBAR Duplexer for PCS Handsets with Wafer-Scale Packaging, 2002 IEEE Ultrasonics Symposium Munich, proceedings, p. 907, 2002.
K.M. Lakin, Coupled Resonator Filters, 2002 IEEE Ultrasonics Symposium Munich, proceedings, p. 879, 2002.
M.A. Dubois, P. Muralt, Stress and Piezoelectric properties of AlN thin films deposited onto metal electrodes by pulsed direct current reactive sputtering, J. Appl. Phys. 89, 6389 (2001).
M.A. Dubois, P. Muralt, Properties of AlN thin films for piezoelectric transducers and microwave filter applications, Appl. Phys. Lett. 74, 3032 (1999).
G.F. Iriarte, J. Bjurström, J. Westlinder, F. Engelmark, I.V. Katardjiev, Synthesis of c-Axis Oriented AlN Thin Films on Metal Layers: Al, Mo, Ti, TiN and Ni, 2002 IEEE Ultrasonics Symposium Munich, proceedings, p. 300, 2002.
J. Kaitila, M. Yililammi, J. Molaris, J. Ellä, T. Makkonen, ZnO base thin film bulk acoustic wave filters for EGSM band, 2001 IEEE Utrasonics Symposium Atlanta, p. 803, 2001.
Q.X. Su, P. Kirby, E. Komoro, M. Imura, Q. Zang, R.W. Whatmore, Thin film bulk acoustic resonators using ZnO and lead zirconium titanate thin films, IEEE Trans. MMT-49, 749 (2001).
S.L. Pinkett, W.D. Hunt, B.P. Barber, P.L. Gammel, Temperature characteristics of ZnO based thin film bulk acoustic wave resonators, 2001 IEEE Utrasonics Symposium Atlanta, p. 823, 2001.
K.M. Lakin, J. Belsick, J.F. McDonald, K.T: Mc Carron, Improved bulk wave resonator coupling coefficient for wide band width filters, 2001 IEEE Utrasonics Symposium Atlanta, p. 827, 2001.
K.M. Lakin, J.F. McDonald, K.T: Mc Carron, Temperature compensated bulk acoustic thin film resonators, 2000 IEEE Utrasonics Symposium Puerto Rico, p. 855, 2000.
M.A. Dubois, P. Muralt, V. Plesky, BAW resonators based on aluminium nitride thin films, 1999 IEEE Ultrasonics Symposium, p. 907, 1999.
A. Rodriguez-Navarro, W. Otano-Rivera, J.M. Garcia-Ruiz, R. Messier & L.J. Pilione, Development of preferred orientation of polycrystalline AlN thin films deposited by rf sputtering at low temperature, J. Mater. Res., 12, 1850–1855 (1997).
J.D. Larson III, R.C. Ruby, P.D. Bradley, J. Wen, S. Kok, A. Chien, Power handling and temperature coefficient studies in FBAR duplexers for the 1900 MHz PCS band, 2000 IEEE Ultrasonics Symposium Puerto Rico, proceedings, p. 869, 2000.
R.F. Milsom, H.P. Loebl, C. Metzmacher, P. Lok, A. Tuinhout, F.v. Straten, 2D Model of Solidly-Mounted and Membrane BAW Devices, 2003 IEEE IEEE Utrasonics Symposium Honolulu, Hawaii, p. 1802, 2003.
H.P. Loebl, R.F. Milsom, C. Metzmacher, A. Tuinhout, P. Lok, F.v. Straten, Low Level Effects in SBARS and their Application to Device Optimization, 2003 IEEE IEEE Utrasonics Symposium Honolulu, Hawaii, p. 182, 2003.
H.K.J. ten Dolle, J.W. Lobeek, A. Tuinhout, J. Foekema, Balanced Lattice-Ladder Bandpass Filter in Bulk Acoustic Wave Technology, International Microwave Symposium IMS, Fort Worth, TX, paper TU5D-6, 2004.
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Loebl, H., Metzmacher, C., Milsom, R., Lok, P., Tuinhout, A. (2005). RF Bulk Acoustic Wave Resonators and Filters. In: Setter, N. (eds) Electroceramic-Based MEMS. Electronic Materials: Science and Technology, vol 9. Springer, Boston, MA. https://doi.org/10.1007/0-387-23319-9_6
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DOI: https://doi.org/10.1007/0-387-23319-9_6
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