Abstract
The chemical vapor deposition (CVD) technique is applied for synthesizing diamond films and plates of large size (∼100 mm) and high quality. In the given work, we consider one of the diamond-structure dimensional processing and microprocessing methods based on the application of a Cu laser, whose irradiation can be focused to a small spot and also used for the intensification of the image brightness in an optical system, which is able to process ∼106 points of an object for one (∼10 ns) or a few pulses. The characteristics of processed surfaces of polycrystalline diamond films and plates are given.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
Ral’chenko, V. and Konov, V., Elektron.: Nauka, Tekhnol., Biznes, 2007, no. 4, p. 58.
Pimenov, S.M., Kononenko, V.V., Ral’chenko, V.G., et al., Appl. Phys. A: Materials Sci. Proc., 1999, vol. 69, no. 1, p. 81.
Hardy, W.A., IBM J. Res. & Develop., 1965, vol. 9, no. 1, p. 1371.
Zemskov, K.I., Isaev, A.A., Kazaryan, M.A. and Petrash, G.G., Kvantovaya Electron., 1976, vol. 3, no. 1, p. 35 [Quantum Electronics (Engl. Transl.), 1976, vol. 6, no. 1, p. 17].
Petrash, G.G., Vestn. Akad. Nauk SSSR, 1982, vol. 2, p. 66.
Buzhinskii, O.I., Evolyutsiya issledovanii Cu-lazera i vozmozhnosti ego prakticheskogo primeneniya: Obzor (Evolution in the Investigation of a Cu Laser and the Possibility of Its Practical Application: Review), Moscow: IAE im I.V. Kurchatova, 1983.
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © R.O. Buzhinskii, K.I. Zemskov, A.A. Isaev, A.V. Vlasov, V.G. Ral’chenko, V.V. Savranskii, 2010, published in Pribory i Tekhnika Eksperimenta, 2010, No. 2, pp. 156–159.
Rights and permissions
About this article
Cite this article
Buzhinskii, R.O., Zemskov, K.I., Isaev, A.A. et al. Precision processing of CVD diamond plates by Cu-laser irradiation. Instrum Exp Tech 53, 301–304 (2010). https://doi.org/10.1134/S0020441210020272
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S0020441210020272