Abstract
Nanocrystalline (NC) diamond films are grown by chemical vapor deposition on various single crystal diamond faces. Under conditions of NC diamond growth, the growing filmmorphology is reduced to two planes: {100} and {111}. The {100} planes are smooth and homoepitaxial layerby-layer growth occurs on them, whereas the NC film formed by twin crystalliteswith sizes of several tens and hundreds nanometers grows on {111} planes. Nitrogen impurity sharply increases the diamond growth rate.
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Original Russian Text © E.E. Ashkinazi, V.S. Sedov, R.A. Khmelnitsky, A.A. Khomich, A.V. Khomich, V.G. Ralchenko, 2016, published in Kratkie Soobshcheniya po Fizike, 2016, Vol. 43, No. 12, pp. 65–70.
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Ashkinazi, E.E., Sedov, V.S., Khmelnitsky, R.A. et al. Growth of nano-crystalline diamond on single-crystalline diamond by CVD method. Bull. Lebedev Phys. Inst. 43, 378–381 (2016). https://doi.org/10.3103/S1068335616120101
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DOI: https://doi.org/10.3103/S1068335616120101