Abstract
In this paper, static behavior of nano/micromirrors under Casimir force is studied. At the first, the equilibrium equation governing the statical behavior of nano/micromirrors is obtained. Then energy method is employed to investigate statical stability of nano/micromirrors equilibrium points and a useful equation is suggested for successful and stable design of nano/micromirrors under Casimir force. Then, equilibrium angle of nano/micromirrors is calculated both numerically and analytically using the homotopy perturbation method (HPM). It is observed that with increasing the instability number defined in the paper, the rotation angle of the mirror is increased and suddenly, pull-in occurs. Since analytical results well follow the numerical ones, the presented analytical method in this paper can be used as a fast, precise and stable design tool in nano/micromirrors under Casimir force.
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This paper was recommended for publication in revised form by Editor Maenghyo Cho
Hamid Moeenfard received his M.Sc degree in mechanical engineering from Sharif University of technology, Tehran, Iran, 2008. He is currently working toward a PhD in mechanical engineering at Sharif University of technology. His main interests are nonlinear vibration, N/MEMS and MOEMS, perturbation theory, Kantorovich method and fuzzy logic and control. His researches are mainly about modeling and analysis of static and dynamic pull-in in electrostatically actuated microbeams/plates using analytical models. His current research is the mechanical modeling of nonlinear vibration and static and dynamic pull-in of electrostatically actuated tosional micromirrors considering squeeze film damping and nonlinear electrical and mechanical nonlinearities.
Ali Darvishian received his B.S. degrees in mechanical engineering from the Sharif University of Technology, Tehran, Iran, in 2010. He is currently working on instability of micro/nano mirrors under effect of various forces for his M.Sc. degree in Mechanical engineering from the Sharif University. His main research interests include modeling, nonlinear dynamics and vibrational analysis of nano/micro electromechanical systems.
M. T. Ahmadian received his B.S. & M.S. degrees in Physics 1972 from Shiraz University, Shiraz, Iran and completed the requirements for B.S. & M.S. degrees in Mechanical Engineering in 1980 from University of Kansas in Lawrence. At the same time he completed his PhD in Physics and PhD in Mechanical Engineering in 1981 and 1986, respectively, from University of Kansas. His research interests are micro and nano mechanics as well as bioengineering.
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Moeenfard, H., Darvishian, A. & Ahmaidan, M.T. Static behavior of nano/micromirrors under the effect of Casimir force, an analytical approach. J Mech Sci Technol 26, 537–543 (2012). https://doi.org/10.1007/s12206-011-1213-2
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DOI: https://doi.org/10.1007/s12206-011-1213-2