Abstract
A displacement sensor based on transmission varied-line-space (VLS) phase gratings is proposed. The relationship between the properties of the sensor and the parameters of VLS is discussed. Compared with the displacement sensor manufactured by the reflective VLS grating, this type of sensor contains a grating with simpler structure and high diffraction efficiency. It also has good stability with the change of temperature.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
LIU Qin-peng, QIAO Xue-guang, and JIA Zhen-an, J of Optoelectronic-Laser, 17 (2006), 1440 (in Chinese)
YU Zhi-hui, YU Chong-xiu, and WANG Xu, J of Optoele ctronic Laser, 17 (2006), 54. (in Chinese)
LIU Qin-peng, QIAO Xue-guang, and JIA Zhen an, J of Optoelectronic Laser, 18 (2007); 147. (in Chinese)
ZHU Hai, LI Zhi-zhong, and SUN Rong-shan, J. of Optoelec tronic Laser, 18 (2007), 536. (in Chinese)
Spillman W.B. Jr. Applied optics, 28 (1989), 3550.
Spillman W.B. Jr. SPIE, 2467 (1995) 187.
Laclair Jr. R., D. Spillman and W. B. Long, SPIE, 2840 (1996), 137.
LI Bing-shi, and WU Zhong. SensorWorld, 11(2004) 32. (in Chinese)
WU Zhong, and LI Bing-shi. SensorWorld, 9 (2005),23. (in Chinese)
LI Bing-shi, and WU Zhong. SensorWorld, 5 (2004), 19. (in Chinese)
WANG Wei, and YANG Hou-min. Acta Optica Sinica, 19 (1999), 1158. (in Chinese)
SHI Lun, and HAO De-fu. Optics and Precision Engineering, 9 (2001), 285. (in Chinese)
SHI Lun, Microfiabricat io n Technology, 4 (2002), 32. (in Chinese)
Harada T., and Kita T. Appl.Opt., 19 (1980), 3987.
HUANG Yong-lin, TONG Zheng-rong, and XIANG Yang, Chinese Journal of Lasers, 29 (2002),1015. (in Chinese)
Taflove A., Hagness A. C. Computational Electrodynamics: The Finite-Difference Time-domain Method [M]. 2nd ed. Artech House, 2000.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Zhou, J., Ouyang, M., Shen, Y. et al. Study of a displacement sensor based on transmission varied-line-space phase grating. Optoelectron. Lett. 4, 217–222 (2008). https://doi.org/10.1007/s11801-008-7155-y
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11801-008-7155-y