Abstract
A piezoelectric platform using function module actuator is presented to achieve nano-positioning and high frequency scanning in large working range. A function module actuator is designed to produce a pair of orthogonal bending deformations and a longitudinal deformation through partition exciting. The bending deformations are used to actuate the planar motion, while the longitudinal deformation is utilized to dynamically adjust the driving force and broaden the scanning frequency. The dynamic model of the platform system is developed. The open-loop performances of a prototype are first tested: a scan frequency of 308 Hz in a scanning range of 3.368 µm×3.396 µm is measured in direct actuation mode, and the displacement resolution is measured to be 16 nm; maximum speed is measured to be 3.38 mm s−1 in the inertial actuation mode. Furthermore, the closed-loop experiments are carried out and a switching strategy is proposed to obtain the switching of the inertial and direct actuation modes automatically; the platform achieves the scanning with frequency of 300 Hz at the set position.
Article PDF
Similar content being viewed by others
Explore related subjects
Discover the latest articles, news and stories from top researchers in related subjects.Avoid common mistakes on your manuscript.
References
Lu H, Shang W, Xie H, et al. Ultrahigh-precision rotational positioning under a microscope: Nanorobotic system, modeling, control, and applications. IEEE Trans Robot, 2018, 34: 497–507
Zhu W L, Zhu Z, He Y, et al. Development of a novel 2-D vibration-assisted compliant cutting system for surface texturing. IEEE/ASME Trans Mechatron, 2017, 22: 1796–1806
Lee C, Salapaka S M. Model based control of dynamic atomic force microscope. Rev Sci Instrum, 2015, 86: 043703
Li L L, Li C X, Gu G, et al. Modified repetitive control based cross-coupling compensation approach for the piezoelectric tube scanner of atomic force microscopes. IEEE/ASME Trans Mechatron, 2019, 24: 666–676
Salim M, Salim D, Chandran D, et al. Review of nano piezoelectric devices in biomedicine applications. J Intel Mat Syst Str, 2018, 29: 2105–2121
Wei Y Z, Xu Q S. A survey of force-assisted robotic cell microinjection technologies. IEEE Trans Automat Sci Eng, 2019, 16: 931–945
Xu D M, Liu Y X, Shi S J, et al. Development of a non-resonant piezoelectric motor with nanometer resolution driving ability. IEEE/ASME Trans Mechatron, 2018, 23: 444–451
Yokozawa H, Doshida Y, Kishimoto S, et al. Resonant-type smooth impact drive mechanism actuator using lead-free piezoelectric material. Sens Actuat A-Phys, 2018, 274: 179–183
Liu J, Liu Y, Zhao L, et al. esign and experiments of a single-foot linear piezoelectric actuator operated in stepping mode. IEEE Trans Ind Electron, 2018, 65: 8063–8071
Liu Y, Yan J, Wang L, et al. A two-DOF ultrasonic motor using a longitudinal-bending hybrid sandwich transducer. IEEE Trans Ind Electron, 2019, 66: 3041–3050
Lai L J, Gu G Y, Zhu L M. Design and control of a decoupled two degree of freedom translational parallel micro-positioning stage. Rev Sci Instrum, 2012, 83: 045105
Schitter G, Stemmer A. Identification and open-loop tracking control of a piezoelectric tube scanner for high-speed scanning-probe microscopy. IEEE Trans Contr Syst Technol, 2004, 12: 449–454
Yong Y K, Moheimani S O R, Kenton B J, et al. Invited review article: High-speed flexure-guided nanopositioning: Mechanical design and control issues. Rev Sci Instrum, 2012, 83: 121101
Li C X, Gu G Y, Yang M J, et al. Design and analysis of a high-speed XYZ nanopositioning stage. In: 2015 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO). Changchun, 2015. 229–234
Yong Y K, Bhikkaji B, Reza Moheimani S O R. Design, modeling, and fpaa-based control of a high-speed atomic force microscope nanopositioner. IEEE/ASME Trans Mechatron, 2013, 18: 1060–1071
Watanabe S, Ando T. High-speed XYZ-nanopositioner for scanning ion conductance microscopy. Appl Phys Lett, 2017, 111: 113106
Qin Y, Tian Y, Zhang D, et al. A novel direct inverse modeling approach for hysteresis compensation of piezoelectric actuator in feedforward applications. IEEE/ASME Trans Mechatron, 2013, 18: 981–989
Wei Y J, Wu C D. Modeling of nano piezoelectric actuator based on block matching algorithm with optimal block size. Sci China Tech Sci, 2013, 56: 2649–2657
Gu G Y, Zhu L M, Su C Y, et al. Modeling and control of piezoactuated nanopositioning stages: A survey. IEEE Trans Automat Sci Eng, 2016, 13: 313–332
Gu G Y, Li C X, Zhu L M, et al. Modeling and identification of piezoelectric-actuated stages cascading hysteresis nonlinearity with linear dynamics. IEEE/ASME Trans Mechatron, 2016, 21: 1792–1797
Liang C, Wang F, Tian Y, et al. Grasping force hysteresis compensation of a piezoelectric-actuated wire clamp with a modified inverse Prandtl-Ishlinskii model. Rev Sci Instrum, 2017, 88: 115101
Wang R, Zhang X. A planar 3-DOF nanopositioning platform with large magnification. Precision Eng, 2016, 46: 221–231
Zhang X, Zhang Y, Xu Q. Design and control of a novel piezo-driven XY parallel nanopositioning stage. Microsyst Technol, 2017, 23: 1067–1080
Shi S J, Liu J K, Chen W S et al. Development of a 2-DOF planar ultrasonic motor using longitudinal-bending hybrid transducer. In: 2009 18th IEEE International Symposium on the Applications of Ferroelectrics. Xi’an, 2009. 341–345
Merry R J E, Maassen M G J M, van de Molengraft M J G, et al. Modeling and waveform optimization of a nano-motion piezo stage. IEEE/ASME Trans Mechatron, 2011, 16: 615–626
Rong W, Liang S, Wang L, et al. Model and control of a compact long-travel accurate-manipulation platform. IEEE/ASME Trans Mechatron, 2017, 22: 402–411
Xu D M, Liu Y K, Liu J K, et al. Developments of a piezoelectric actuator with nano-positioning ability operated in bending modes. Ceramics Int, 2017, 43: S21–S26
Deng J, Liu Y K, Liu J K, et al. Development of a planar piezoelectric actuator using bending-bending hybrid transducers. IEEE Trans Ind Electron, 2019, 66: 6141–6149
Chen Z, Li X, Liu G, et al. A two degrees-of-freedom piezoelectric single-crystal micromotor. J Appl Phys, 2014, 116: 224101
Liu Y, Wang L, Gu Z, et al. Development of a two-dimensional linear piezoelectric stepping platform using longitudinal bending hybrid actuators. IEEE Trans Ind Electron, 2019, 66: 3030–3040
Li J P, Zhou X Q, Zhao H W, et al. Development of a novel parasitic-type piezoelectric actuator. IEEE/ASME Trans Mechatron, 2017, 22: 541–550
Boudaoud M, Lu T, Liang S, et al. A voltage/frequency modeling for a multi-dofs serial nanorobotic system based on piezoelectric inertial actuators. IEEE/ASME Trans Mechatron, 2018, 23: 2814–2824
Oubellil R, Voda A, Boudaoud M, et al. Mixed stepping/scanning mode control of stick-slip sem-integrated nano-robotic systems. Sens Actuat A-Phys, 2019, 285: 258–268
Hutchinson J R. Shear coefficients for Timoshenko beam theory. J Appl Mech, 2001, 68: 87–92
Deng J, Liu Y X, Chen W S, et al. A XY transporting and nanopositioning piezoelectric robot operated by leg rowing mechanism. IEEE/ASME Trans Mechatron, 2019, 24: 207–217
Brown S R, Scholz C H. Closure of random elastic surfaces in contact. J Geophys Res, 1985, 90: 5531–5545
Wit C C, Olsson H, Astrom K J, et al. A new model for control of systems with friction. IEEE Trans Automat Contr, 1995, 40: 419–425
Wu Z Y, Xu Q S. Design, fabrication, and testing of a new compact piezo-driven flexure stage for vertical micro/nanopositioning. IEEE Trans Automat Sci Eng, 2019, 16: 908–918
Author information
Authors and Affiliations
Corresponding author
Additional information
This work was supported by the National Natural Science Foundation of China (Grant Nos. U1913215 & 51975162).
Rights and permissions
About this article
Cite this article
Deng, J., Liu, Y., Zhang, S. et al. Modeling and experiments of a nano-positioning and high frequency scanning piezoelectric platform based on function module actuator. Sci. China Technol. Sci. 63, 2541–2552 (2020). https://doi.org/10.1007/s11431-020-1676-7
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11431-020-1676-7