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Correction to: Plasma Chemistry and Plasma Processing https://doi.org/10.1007/s11090-020-10096-w
The original version of this article unfortunately contained a mistake in the abstract section and figure 7. The corrections are listed below.
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(a)
In the Abstract section: 4th line “BCl3” is repeated twice. It should read as “A break-down in mixtures of BCl3 and BF3 with hydrogen, argon, and methane are studied both theoretically and experimentally.”
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(b)
Figure 7 is incorrect. The correct Fig. 7 is given below.
MS spectra of a BCl3; b BCl3 + H2; c BCl3 + H2 + CH4; d BF3; e BF3 + H2; and f BF3 + H2 + CH4. The black and red correspond to spectra taken before and after laser irradiation, correspondingly
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Gornushkin, I.B., Sennikov, P.G., Kornev, R.A. et al. Correction to: Laser Induced Dielectric Breakdown for Chemical Vapor Deposition by Hydrogen Reduction of Volatile Boron Halides BCl3 and BF3. Plasma Chem Plasma Process 40, 1639–1640 (2020). https://doi.org/10.1007/s11090-020-10107-w
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DOI: https://doi.org/10.1007/s11090-020-10107-w