Abstract
A real-time in-situ time-resolved (~1 ns) optical reflectivity and transmission (TRORT) measurement system combining two He–Ne probe lasers, a digital oscilloscope, and three fast photodiodes is developed to investigate the rapid phase-change processes of Si thin films during the excimer-laser crystallization (ELC). The changes in both reflectivity and transmission of Si thin films during ELC are recorded by the TRORT measurement system. Melting and resolidification behaviors of Si thin films during ELC are interpreted. The fall time of liquid Si is reduced with increase in the excimer-laser energy density, while the rise time of liquid Si remains approximately constant at 5 ns. The first small peak in the reflectivity spectrum is proved to be not a phenomenon of explosive crystallization.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
Nakazawa, J. Appl. Phys., 69, 1703 (1991).
S. Friligkos, V. Papaioannou, J. Stoemenos, et al., J. Cryst. Grow., 182, 341 (1997).
G. Williams, D. Sands, R. M. Geatches, and K. J. Reeson, Appl. Phys. Lett., 69, 1623 (1996).
M. Hatano, S. Moon, M. Lee, et. al., J. Appl. Phys., 87, 35 (2000).
R. Ishihara and M. Matsumura, Jpn J. Appl. Phys., 36, 6167 (1997).
P. Mei, J. B. Boyce, M. Hack, et al., Appl. Phys. Lett., 64, 1132 (1994).
M. He, R. Ishihara, Y. Hiroshima, et al., Jpn J. Appl. Phys., 45, 1 (2006).
C. C. Kuo, Opt. Lasers Eng., 46, 440 (2008).
D. H. Auston, C. M. Surko, T. N. C. Venkatesan, et al., Appl. Phys. Lett., 33, 437 (1978).
M. Hatano, S. Moon, M. Lee, et al., J. Non-Cryst. Sol., 266, 654 (2000).
J. Boneberg and P. Leiderer, Phys. Status Sol. A, 166, 643 (1998).
J. Siegel, J. Solis, and C. N. Afonso, Appl. Phys. Lett., 75, 1071 (1999).
H. J. Kim and J. S. Im, Appl. Phys. Lett., 68, 1513 (1996).
F. C. Voogt, R. Ishihara, and F. D. Tichelaar, J. Appl. Phys., 95, 2873 (2004).
J. S. Im, M. A. Crowder, R. S. Sposili, et al., Phys. Status Sol. A, 166, 603 (1998).
G. Andra, J. Bergmann, F. Falk, and E. Ose, Appl. Surf. Sci., 154, 123 (2000).
M. Hatano, S. Moon, M. Lee, et al., J. Korean Phys. Soc., 39, S419 (2001).
G. Auvert, D. Bensahel, A. Perio, et al., Appl. Phys. Lett., 39, 724 (1981).
R. L. Chapman, J. C. C. Fan, H. J. Zeiger, and R. P. Gale, Appl. Phys. Lett., 37, 292 (1981).
J. J. P. Bruines, R. P. M. van Hal, H. M. J. Boots, et al., Appl. Phys. Lett., 48, 1252 (1986).
D. H. Lowndes, R. F. Wood, and J. Narayan, Phys. Rev. Lett., 52, 561 (1984).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Kuo, CC. Characterization of in-situ time-resolved optical spectra during excimer-laser crystallization. J Russ Laser Res 30, 12–20 (2009). https://doi.org/10.1007/s10946-009-9057-2
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10946-009-9057-2