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The thermochromic characteristics of ITO/VO2 composite films on SiO2 nanospheres

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Abstract

As a promising thermochromic material for smart windows, VO2-based films have received extensive attention. To enhance the luminous transmittance (Tlum) of thermochromic smart windows without seriously affecting the solar modulation efficiency (ΔTsol), this paper prepared VO2 films by rapid thermal annealing of sputtered vanadium thin films on an ordered SiO2 nanosphere array, and then the ITO as antireflection layer was deposited on VO2 film by reactive magnetron sputtering. The surface morphology, crystal structure and optical transmittance of the films were characterized by Scanning Electron Microscopy, X-ray diffraction and UV–VIS–NIR spectrophotometer, respectively. The SiO2 nanospheres provide continuous refractive index gradient, while the deposition of the ITO antireflection layer creates conditions for thin film interference, thereby synergistically reducing surface reflection in the VO2-based smart window. Compared with the planar VO2 thin film (Tlum, 39.1%), the ITO/VO2/SiO2 composite structure can significantly increase the Tlum from 39.1 to 55.5%, an increase of nearly 16.4%, while the ΔTsol is basically unchanged. The results provide an effective strategy for improving the performance of smart windows.

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Acknowledgements

This work was supported by the National Natural Science Foundation of China (Grant No. 62004140, 52302339), the Natural Science Foundation of Tianjin (Grant No. 22JCQNJC01370), the Open Project Program of Shanxi Key Laboratory of Advanced Semiconductor Optoelectronic Devices and Integrated Systems (Grant No. 2023SZKF23).

Funding

This work was supported by the National Natural Science Foundation of China (Grant Nos. 62004140, 52302339), Natural Science Foundation of Tianjin (Grant No. 22JCQNJC01370), Open Project Program of Shanxi Key Laboratory of Advanced Semiconductor Optoelectronic Devices and Integrated Systems (Grant No. 2023SZKF23).

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Authors and Affiliations

  1. Tianjin Key Laboratory of Film Electronic & Communication Devices, School of Integrated Circuit Science and Engineering, Tianjin University of Technology, No. 391 Bin Shui Xi Dao Road, Xiqing District, Tianjin, 300384, China

    Xiaofei Zeng, Liwei Zhou, Wei Mi, Di Wang & Linan He

  2. Shanxi Key Laboratory of Advanced Semiconductor Optoelectronic Devices and Integrated Systems, Jincheng, 048000, China

    Dongdong Qi

  3. Jincheng Research Institute of Opto-mechatronics Industry, Jincheng, 048000, China

    Dongdong Qi

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  1. Xiaofei Zeng
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  2. Liwei Zhou
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  3. Wei Mi
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  4. Di Wang
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Contributions

Xiaofei Zeng: data curation, validation, writing—review & editing. Liwei Zhou: conceptualization, methodology, writing, funding acquisition—original draft. Wei Mi: validation. Di Wang: investigation. Linan He: supervision, writing—review & editing, funding acquisition. Dongdong Qi: supervision, formal analysis.

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Correspondence to Liwei Zhou.

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Zeng, X., Zhou, L., Mi, W. et al. The thermochromic characteristics of ITO/VO2 composite films on SiO2 nanospheres. J Mater Sci: Mater Electron 35, 752 (2024). https://doi.org/10.1007/s10854-024-12539-y

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