Abstract
This paper presents an analysis of the thermo-electro-mechanical behaviour of the piezoelectric microcomponents during their self-heating at harmonic oscilltions. The reasons of the self-heating effect are discussed. An iterational algorithm for solving the self-heating problem is suggested based on the thermo-visco-elastic model and the equations describing the piezoelectric effect. The thermal energy dissipated into piezoelectric microcomponents during their oscillations is obtained. It is shown that the characteristics of the piezoelectric microcomponents depend in great extent on the influence of the thermal fields of the self-heating. The thermo-electro-mechanical analysis is carried out by the finite element method (FEM).
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Received: 1 June 2001/Accepted: 26 October 2001
Present address: R. Keoschkerjan Department of Micromechanics, Actuators and Fluidics, Fraunhofer-Institute of Microelectronic Circuits and Systems, Hansastrasse 27 d D-80686 Muenchen, Germany e-mail: keoschkerjan@imsm.fhg.de
This paper was presented at the Conference of Micro System Technologies 2001 in March 2001.
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Keoschkerjan, R., Harutyunyan, M. & Wurmus, H. Analysis of self-heating phenomenon of piezoelectric microcomponents actuated harmonically. Microsystem Technologies 9, 75–80 (2002). https://doi.org/10.1007/s00542-002-0198-2
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DOI: https://doi.org/10.1007/s00542-002-0198-2