Abstract.
This work introduces the concept of edge-field regularization into photothermal inverse depth profilometry problems. An edge field allows prior information concerning the depth location of material interfaces in a sample to be introduced into a Tikhonov regularization problem by a simple binary encoding. The edge-field regularization allows Nth-order Tikhonov stabilization constraints to be applied independently to multiple zones or segments of a depth profile between defined interface positions. This allows the reconstruction of continuous depth-profile information within known layers, without the globally imposed smoothing and edge oscillations of the classical regularization methods. This method successfully reconstructs both the amplitude of the interface discontinuities and the photothermal depth-contrast variations within the bounding edges, to a resolution limited by the resolving kernel for the underlying Nth-order Tikhonov constraint. The edge-field regularization dramatically reduces the errors associated with profiling photothermal contrast in bounded zones that are depth-displaced in the sample.
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Received: 19 September 2002 / Published online: 5 May 2003
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Power, J. Linear Tikhonov regularization against an edge field: an improved reconstruction algorithm in photothermal depth profilometry . Appl Phys B 76, 569–582 (2003). https://doi.org/10.1007/s00340-003-1105-y
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DOI: https://doi.org/10.1007/s00340-003-1105-y