Abstract
We briefly review the physical background on which Deep Level Transient Spectroscopy is based and we present the basic design and operation principles of a high performance and low cost microcomputer based DLTS system. Detailed examples are given of the system’s use in the study of platinum silicides methods of preparation and in the study of defects in MOCVD grown AlxGa1−xAs.
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Giakoumakis, G.E., Evangelou, E.K. & Alexandropoulos, N.G. Deep Level Transient Spectroscopy techniques and systems. Acta Physica Hungarica 74, 129–138 (1994). https://doi.org/10.1007/BF03055244
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DOI: https://doi.org/10.1007/BF03055244