Abstract
A particular case of a problem on interaction of plasma with a surface is examined experimentally. We study interaction of its own plasma with boundary surfaces in a low-pressure radio-frequency (RF) capacitive discharge (RFCD) by considering their functions. On the basis of the physical model of RFCD substantiated earlier, we examine experimentally the physical conditions taking place in a near-electrode layer of space discharge, which lead to formation of pulsed electron beams and highly non-equilibrium plasma electron energy spectrum. We verify experimentally the known fact that in RFCD it is possible to generate natural oscillating LC circuits modulating the discharge current, and the conditions of their excitation by their own electron beams are clarified.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
V. P. Savinov, Physics of Radiofrequency Capacitive Discharge (CRC, Taylor and Francis, Boca Raton, New York, London, 2018).
A. F. Alexandrov, V. L. Kovalevsky, V. P. Savinov, and I. F. Singaevsky, in Proceedings of the 22nd International Conference on Phenomena in Ionized Gases (Hoboken, USA, 1995), Vol. 2, p. 167.
H. Butler and G. Kino, Phys. Fluids 6, 1346 (1963).
Yu. P. Raizer and M. N. Schneider, Fiz. Plazmy 18, 1211 (1992).
B. A. Brusilovsky, Kinetic Ion-Electron Emission (Energoatomizdat, Moscow, 1990) [in Russian].
V. L. Kovalevsky, V. A. Riaby, V. P. Savinov, and V. G. Yakunin, in Proceedings of the 22nd International Conference on Phenomena in Ionized Gases (Belfast, North Ireland, UK, 2011).
H. D. Hagstrum, Phys. Rev. 104, 672 (1956).
R. Seebock, R. Deutsch, and E. Rauchle, J. Vac. Sci. Technol. A 11, 682 (1993).
R. T. Schneider, NASA Contractor Report No. 3570 (1982).
Author information
Authors and Affiliations
Corresponding author
Additional information
Conflict of Interest
The authors declare that they have no conflicts of interest.
Russian Text © The Author(s), 2019, published in Yadernaya Fizika i Inzhiniring, 2019, Vol. 10, No. 2.
Rights and permissions
About this article
Cite this article
Savinov, V.P., Kruglov, M.S., Riaby, V.A. et al. Plasma Interaction with Boundary Surfaces in Low-Pressure Radio-Frequency Capacitive Discharge. Phys. Atom. Nuclei 82, 1433–1436 (2019). https://doi.org/10.1134/S106377881910017X
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S106377881910017X