Abstract
The possibility of mapping the elasticity modulus during scanning of the material surface with a piezoresonance probe is proposed. An analytical model is proposed that describes the force of an elastic interaction between the surface and an indenter in the form of a truncated cone as a function of a displacement. Within the framework of this model, dependences were obtained that allow the elasticity-modulus value to be determined, provided that the data on the average force of a semicontact interaction, the amplitude, and the frequency of probe resonance oscillations are available. The obtained dependences were used for mapping the elasticity modulus of the boundaries of deposited aluminum and copper films on glass, as well as for a TGZ2 test structure. Experiments were performed using a NanoScan 3D scanning nanohardness tester, and a resolution of 0.2 μm was attained. This technique is applicable to materials that allow only an elastic deformation and can be used in instruments that can operate in a range of contact forces providing predominantly elastic deformations.
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Kim, J., Wang, J., Kang, H., and Talke, F., Polym. Eng. Sci., 2008, vol. 48, pp. 277–282. DOI: doi 10.1002/pen.20883
Sweers, K., van der Werf, K., Bennink, M., and Subramaniam, V., Nanoscale Res. Lett., 2011, vol. 6, no. 1, p. 270. DOI: 10.1186/1556-276X-6-27010.1186 /1556-276X-6-270
Cuy, J.L., Livi, K.J., Teaford, M.F., and Weihs, T.P., Arch. Oral Biol., 2002, vol. 47, pp. 281. DOI: 10.1016/ S0003-9969(02)00006-7
Franze, K., Francke, M., Gunter, K., Christ, and F., Korber, N., Reichenbach, A., and Guck, J., Soft Matter., 2011, vol. 7, pp. 3147–3154. DOI: 10.1039/ C0SM01017K
Oliver, W.C. and Pharr, G.M., J. Mater. Res., 2004, vol. 19, pp. 3–20. DOI:10.1557/jmr.2004.19.1.3
Maslenikov, I.I., Reshetov, V.N., Loginov, B.A., and Useinov, A.S., Instrum. Exp. Tech., 2015, no. 3 (in press).
Syed, A.S.A., Wahl, K.J., Colton, R.J., and Warren, O.L., J. Appl. Phys., 2001, vol. 90, pp. 1192–1200. DOI: 10.1063/1.1380218
Magonov, S., Expanding Atomic Force Microscopy with Hybrid Mode Imaging, Appl. Note 087. NT-MDT, 2013.
Sahin, O. and Erina, N., Nanotechnology, 2008, vol. 19, p. 445717. DOI: 10.1088/0957-4484/19/44/445717
Schön, P., Bagdi, K., Molnár, K., Markus, P., Pukánszky, B., and Vancso, G.J., Eur. Polym. J., 2011, vol. 47, pp. 692–698. DOI: 10.1016/j.eurpolymj. 2010.09.029
Dokukin, M.E. and Sokolov, I., Langmuir, 2012, vol. 28, pp. 16060–16071. DOI: 10.1021/la302706b
Useinov, A., Gogolinskiy, K., and Reshetov, V., Int. J. Mater. Res., 2009, vol. 100, pp. 968–972. DOI: 10.3139/146.110138
Soshnikov, A.I., Kravchuk, K.S., Maslenikov, I., Ovchinnikov, D.V., and Reshetov, V.N., Instrum. Exp. Tech., 2013, vol. 56, pp. 133–139. DOI: 10.7868//S0032816213020146
Useinov, A.S., Kravchuk, K.S., and Maslenikov, I.I., Nanoindustriya, 2013, no. 7, pp. 48–57.
Useinov, A.S. and Useinov, S.S., Philos. Mag., 2012, vol. 92, pp. 3188–3198. DOI: 10.1080/14786435.2012.670285
Giessibl, F., Phys. Rev., B: Condens. Matter Mater. Phys., 1997, vol. 56, pp. 16010–16015. DOI: 10.1103/PhysRevB.56.16010
Durig, U., Appl. Phys. Lett., 1999, vol. 433, pp. 433–435. DOI: doi 10.1063/1.124399
Johnson, K., Contact Mechanics, Cambridge: University Press, 1987.
Fischer-Cripps, A.C., Nanoindentation, New York: Springer-Verlag, 2011.
Shimamoto, A., Tanaka, K., Akiyma, Y., and Yoshizaki, H., Philos. Mag. A, 1996, vol. 74, pp. 1097–1105. DOI: 10.1080/01418619608239710
Sawa, T., Akiyama, Y., Shimamoto, A., and Tanaka, K., J. Mater. Res., 1999, vol. 14, pp. 2228–2232. DOI: 10.1557/JMR.1999.0299
Sneddon, I., Int. J. Eng. Sci., 1965, vol. 3, pp. 47–57. DOI: 10.1016/0020-7225(65)90019-4
Pharr, G.M., Oliver, W.C., and Brotzen, F.R., J. Mater. Res., 1992, vol. 7, pp. 613–617. DOI: doi 10.1557/ JMR.1992.0613
Korol'kov, V.P. and Konchenko, S.A., Optoelectron., Instrum. Data Proces., 2012, vol. 48, pp. 211–217. DOI: 10.3103/S875669901202015X
Gogolinskii, K.V., Gubskii, K.L., Kuznetsov, A.P., Reshetov, V.N., Maslenikov, I.I., Golubev, S.S., Lysenko, V.G., and Rumyantsev, S.I., Measur. Tech., 2012, vol. 55, pp. 400–405. DOI: 10.1007/s11018-012-9972-4
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Original Russian Text © I.I. Maslenikov, V.N. Reshetov, A.S. Useinov, 2015, published in Pribory i Tekhnika Eksperimenta, 2015, No. 5, pp. 136–142.
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Maslenikov, I.I., Reshetov, V.N. & Useinov, A.S. Mapping the elastic modulus of a surface with a NanoScan 3D scanning microscope. Instrum Exp Tech 58, 711–717 (2015). https://doi.org/10.1134/S0020441215040223
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DOI: https://doi.org/10.1134/S0020441215040223