Abstract
Two-dimensional(2D) transition metal dichalcogenides(TMDCs) semiconductors, such as monolayers of molybdenum disulfide(MoS2) and tungsten disulfide(WS2) can potentially serve as ultrathin channel materials for building short channel field-effect transistors(FETs) to further extend Moore’s Law. It is essential to develop control-lable approaches for the synthesis of large single crystals of these 2D semiconductors to promote their practical applications in future electronics. In this short review, we summarized the recent advances on the chemical vapor deposition(CVD) of single crystalline semiconducting 2D TMDCs with a large size. We first discussed the driving force and urgent demands on developing controllable approaches for the growth of large 2D TMDCs single crystals and then summarized the current strategies and representative studies on the CVD growth of large 2D single crystals. Finally, we discussed the challenges and future directions in this topic.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
Cooke Y. E., Engineering Science & Education Journal, 1998, 7, 100
Lundstrom M., Science, 2003, 299, 210
Ghetti A., Microelectron Eng., 2001, 59, 127
Yang P. L., Hook T. B., Oldiges P. J., Doris B. B., IEEE Trans. Electron Devices, 2016, 63, 3327
Auth C., Allen C., Blattner A., Bergstrom D., Brazier M., Bost M., Buehler M., Chikarmane V., Ghani T., Glassman T., 2012 Symposium on VLSI Technology(VLSLT), 2012, 131
Mak K. F., Shan J., Nat. Photonics, 2016, 10, 216
Voiry D., Mohite A., Chhowalla M., Chem. Soc. Rev., 2015, 44, 2702
Wilson J. A., Yoffe A., Adv. Phys., 1969, 18, 193
Yoffe A. D., Adv. Phys., 1993, 42, 173
Ling X., Lin Y., Ma Q., Wang Z., Song Y., Yu L., Huang S., Fang W., Zhang X., Hsu A. L., Bie Y., Lee Y. H., Zhu Y., Wu L., Li J., Jarillo-Herrero P., Dresselhaus M., Palacios T., Kong J., Adv. Mater., 2016, 28, 2322
Theis T. N., Wong H. S. P., Comput. Sci. Eng., 2017, 19, 41
Pop E., Nano Res., 2010, 3, 147
Saha P., Banerjee P., Dash D. K., Sarkar S. K., J. Mater. Eng. Perform., 2018, 27, 2708
Wolf S., Sunset Beach, CA, 1990, 11290, 321
Wang J., Zheng H., Xu G., Sun L., Hu D., Lu Z., Liu L., Zheng J., Tao C., Jiao L., J. Am. Chem. Soc., 2016, 138, 16216
Li L. J., Lu W. J., Liu Y., Qu Z., Ling L. S., Sun Y. P., Physica C, 2013, 492, 64
Valla T., Fedorov A., Johnson P., Glans P., Mcguinness C., Smith K., Andrei E., Berger H., Phys. Rev. Lett., 2004, 92, 086401
Tissen V., Osorio M., Brison J. P., Nemes N., García-Hernández M., Cario L., Rodiere P., Vieira S., Suderow H., Phys. Rev. B, 2013, 87, 134502
Voiry D., Goswami A., Kappera R., Silva C., Kaplan D., Fujita T., Chen M., Asefa T., Chhowalla M., Nat. Chem., 2015, 7, 45
Zheng J., Yan X., Lu Z., Qiu H., Xu G., Zhou X., Wang P., Pan X., Liu K., Jiao L., Adv. Mater., 2017, 29, 1604540
Liu L., Wu J., Wu L., Ye M., Liu X., Wang Q., Hou S., Lu P., Sun L., Zheng J., Xing L., Gu L., Jiang X., Xie L., Jiao L., Nat. Mater., 2018, 17, 1108
Ye G., Gong Y., Lin J., Li B., He Y., Pantelides S. T., Zhou W., Vajtai R., Ajayan P. M., Nano Lett., 2016, 16, 1097
Wang Q. H., Kalantar-Zadeh K., Kis A., Coleman J. N., Strano M. S., Nat. Nanotechnol, 2012, 7, 699
Geim A. K., Grigorieva I. V., Nature, 2013, 499, 419
Miro P., Audiffred M., Heine T., Chem. Soc. Rev., 2014, 43, 6537
Manzeli S., Ovchinnikov D., Pasquier D., Yazyev O. V., Kis A., Nat. Rev. Mater., 2017, 2, 17033
Hu D., Zhao T., Ping X., Zheng H., Xing L., Liu X., Zheng J., Sun L., Gu L., Tao C., Wang D., Jiao L., Angew. Chem. Int. Ed. Engl., 2019, 58, 6977
Jariwala D., Sangwan V. K., Late D. J., Johns J. E., Dravid V. P., Marks T. J., Lauhon L. J., Hersam M. C., Appl. Phys. Lett., 2013, 102, 173107
Huang J. K., Pu J., Hsu C. L., Chiu M. H., Juang Z. Y., Chang Y. H., Chang W. H., Iwasa Y., Takenobu T., Li L. J., ACS Nano, 2014, 8, 923
Wang X., Gong Y., Shi G., Chow W. L., Keyshar K., Ye G., Vajtai R., Lou J., Liu Z., Ringe E., Tay B. K., Ajayan P. M., ACS Nano, 2014, 8, 5125
Ovchinnikov D., Allain A., Huang Y. S., Dumcenco D., Kis A., ACS Nano, 2014, 8, 8174
Radisavljevic B., Radenovic A., Brivio J., Giacometti V., Kis A., Nat. Nanotechnol, 2011, 6, 147
Liu X., Hu J., Yue C., Della Fera N., Ling Y., Mao Z., Wei J., ACS Nano, 2014, 8, 10396
Zhao Y., Qiao J., Yu Z., Yu P., Xu K., Lau S. P., Zhou W., Liu Z., Wang X., Ji W., Chai Y., Adv. Mater., 2017, 29, 1604230
Zhou C., Zhao Y., Raju S., Wang Y., Lin Z., Chan M., Chai Y., Adv. Funct. Mater., 2016, 26, 4223
Kappera R., Voiry D., Yalcin S. E., Branch B., Gupta G., Mohite A. D., Chhowalla M., Nat. Mater., 2014, 13, 1128
Zhang Y., Yao Y. Y., Sendeku M. G., Yin L., Zhan X. Y., Wang F., Wang Z. X., He J., Adv. Mater., 2019, 31, 1901694
Liu T., Liu S., Tu K. H., Schmidt H., Chu L., Xiang D., Martin J., Eda G., Ross C. A., Garaj S., Nat. Nanotechnol, 2019, 14, 223
Cui Y., Xin R., Yu Z., Pan Y., Ong Z. Y., Wei X., Wang J., Nan H., Ni Z., Wu Y., Chen T., Shi Y., Wang B., Zhang G., Zhang Y. W., Wang X., Adv. Mater., 2015, 27, 5230
Das S., Chen H. Y., Penumatcha A. V., Appenzeller J., Nano Lett., 2013, 13, 100
Cho S., Kim S., Kim J. H., Zhao J., Seok J., Keum D. H., Baik J., Choe D. H., Chang K. J., Suenaga K., Kim S. W., Lee Y. H., Yang H., Science, 2015, 349, 625
Desai S. B., Madhvapathy S. R., Sachid A. B., Llinas J. P., Wang Q., Ahn G. H., Pitner G., Kim M. J., Bokor J., Hu C., Wong H. P., Javey A., Science, 2016, 354, 99
Zhang H., ACS Nano, 2015, 9, 9451
Liu H., Neal A. T., Ye P. D., ACS Nano, 2012, 6, 8563
Kang K., Xie S., Huang L., Han Y., Huang P. Y., Mak K. F., Kim C. J., Muller D., Park J., Nature, 2015, 520, 656
Lin Z., Liu Y., Halim U., Ding M., Liu Y., Wang Y., Jia C., Chen P., Duan X., Wang C., Song F., Li M., Wan C., Huang Y., Duan X., Nature, 2018, 562, 254
Mennel L., Symonowicz J., Wachter S., Polyushkin D. K., Molina-Mendoza A. J., Mueller T., Nature, 2020, 579, 62
Yazyev O. V., Louie S. G., Nat. Mater., 2010, 9, 806
Peng J., Wu J., Li X., Zhou Y., Yu Z., Guo Y., Wu J., Lin Y., Li Z., Wu X., Wu C., Xie Y., J. Am. Chem. Soc., 2017, 139, 9019
Kulkarni S. S., Wang C. C., Sabbavarapu N. M., Podilapu A. R., Liao P. H., Hung S. C., Chem. Rev., 2018, 118, 8025
Zhou H., Wang C., Shaw J. C., Cheng R., Chen Y., Huang X., Liu Y., Weiss N. O., Lin Z., Huang Y., Duan X., Nano Lett., 2015, 15, 709
Hu D., Xu G., Xing L., Yan X., Wang J., Zheng J., Lu Z., Wang P., Pan X., Jiao L., Angew. Chem. Int. Ed. Engl., 2017, 56, 3611
Li G., Zhang Y. Y., Guo H., Huang L., Lu H., Lin X., Wang Y. L., Du S., Gao H. J., Chem. Soc. Rev., 2018, 47, 6073
Li X., Cai W., An J., Kim S., Nah J., Yang D., Piner R., Velamakanni A., Jung I., Tutuc E., Banerjee S. K., Colombo L., Ruoff R. S., Science, 2009, 324, 1312
Liu K. K., Zhang W., Lee Y. H., Lin Y. C., Chang M. T., Su C. Y., Chang C. S., Li H., Shi Y., Zhang H., Lai C. S., Li L. J., Nano Lett., 2012, 12, 1538
Wang S. S., Rong Y. M., Fan Y., Pacios M., Bhaskaran H., He K., Warner J. H., Chem. Mater., 2014, 26, 6371
van der Zande A. M., Huang P. Y., Chenet D. A., Berkelbach T. C., You Y., Lee G. H., Heinz T. F., Reichman D. R., Muller D. A., Hone J. C., Nat. Mater., 2013, 12, 554
Hao Y., Bharathi M. S., Wang L., Liu Y., Chen H., Nie S., Wang X., Chou H., Tan C., Fallahazad B., Ramanarayan H., Magnuson C. W., Tutuc E., Yakobson B. I., McCarty K. F., Zhang Y. W., Kim P., Hone J., Colombo L., Ruoff R. S., Science, 2013, 342, 720
Chen J., Zhao X., Tan S. J., Xu H., Wu B., Liu B., Fu D., Fu W., Geng D., Liu Y., Liu W., Tang W., Li L., Zhou W., Sum T. C., Loh K. P., J. Am. Chem. Soc., 2017, 139, 1073
Chen W., Zhao J., Zhang J., Gu L., Yang Z., Li X., Yu H., Zhu X., Yang R., Shi D., Lin X., Guo J., Bai X., Zhang G., J. Am. Chem. Soc., 2015, 137, 15632
Lin Z., Zhao Y., Zhou C., Zhong R., Wang X., Tsang Y. H., Chai Y., Sci. Rep., 2015, 5, 18596
Fei L., Lei S., Zhang W. B., Lu W., Lin Z., Lam C. H., Chai Y., Wang Y., Nat. Commun., 2016, 7, 12206
Liu C., Xu X., Qiu L., Wu M., Qiao R., Wang L., Wang J., Niu J., Liang J., Zhou X., Zhang Z., Peng M., Gao P., Wang W., Bai X., Ma D., Jiang Y., Wu X., Yu D., Wang E., Xiong J., Ding F., Liu K., Nat. Chem., 2019, 11, 730
Yang P., Zou X., Zhang Z., Hong M., Shi J., Chen S., Shu J., Zhao L., Jiang S., Zhou X., Huan Y., Xie C., Gao P., Chen Q., Zhang Q., Liu Z., Zhang Y., Nat. Commun., 2018, 9, 979
Dumcenco D., Ovchinnikov D., Marinov K., Lazic P., Gibertini M., Marzari N., Lopez Sanchez O., Kung Y. C., Krasnozhon D., Chen M. W., Bertolazzi S., Gillet P., Fontcuberta I., Morral A., Radenovic A., Kis A., ACS Nano, 2015, 9, 4611
Gao Y., Liu Z., Sun D. M., Huang L., Ma L. P., Yin L. C., Ma T., Zhang Z., Ma X. L., Peng L. M., Cheng H. M., Ren W., Nat. Commun., 2015, 6, 8569
Lee J. S., Choi S. H., Yun S. J., Kim Y. I., Boandoh S., Park J. H., Shin B. G., Ko H., Lee S. H., Kim Y. M., Lee Y. H., Kim K. K., Kim S. M., Science, 2018, 362, 817
Author information
Authors and Affiliations
Corresponding author
Additional information
Supported by the National Natural Science Foundation of China(Nos.21875127, 21925504) and the Tsinghua University Initiative Scientific Research Program, China.
Rights and permissions
About this article
Cite this article
Zhou, S., Jiao, L. Growth of Single-crystalline Transition Metal Dichalcogenides Monolayers with Large-size. Chem. Res. Chin. Univ. 36, 511–517 (2020). https://doi.org/10.1007/s40242-020-0188-x
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s40242-020-0188-x