Abstract
Surface acoustic wave (SAW) resonators and film bulk acoustic resonators (FBAR) are two of the most important passive resonators. After several decades of research and development, they are widely applied for wireless communications such as filters and duplexers, and broad sensing applications like pressure sensors, temperature sensors, gas sensors, biosensors, photoelectric sensors, and many others. In this chapter, we first introduce basic concepts and mainstream topics of SAW and FBAR devices. Then we give a detailed presentation of several methods to fabricate high-performance resonators including using multilayered structures and improved process. Flexible SAW and FBAR devices are also introduced. Several sensing applications are given afterwards. Finally, a summary and outlook is presented regarding the further improvement of device performance and new research fields.
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Zhou, C., Tian, X., Ren, TL. (2018). High-Performance Acoustic Devices for Wireless Communication and Sensor Applications. In: Huang, QA. (eds) Micro Electro Mechanical Systems. Micro/Nano Technologies, vol 2. Springer, Singapore. https://doi.org/10.1007/978-981-10-2798-7_35-1
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DOI: https://doi.org/10.1007/978-981-10-2798-7_35-1
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