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Laser Cleaning of Contaminated Substrate Surfaces

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Handbook of Laser Micro- and Nano-Engineering

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Abstract

As a regular maintenance and repair procedure in manufacturing industries, removal of surface contaminants could be executed by environment-friendly laser cleaning technologies, including dry laser cleaning, steam laser cleaning, or laser shockwave cleaning, which is defined by the applied medium during cleaning process. Based on the mechanisms behind the various types of laser cleaning, a series of researches have been conducted to enhance the cleaning quality and efficiency. Evaluation of surface damage stands as one of the key issues to be concerned during laser cleaning, involving morphology and chemical composition change, defect formation, and material distortion. Four typical cases are presented to indicate the feasibility of this method.

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Author information

Authors and Affiliations

  1. Department of Mechanical & Electrical Engineering, School of Aerospace Engineering, Xiamen University, Xiamen, Fujian Province, China

    Rui Zhou

  2. Department of Electrical and Computer Engineering, National University of Singapore, Singapore, Singapore

    Minghui Hong

Authors
  1. Rui Zhou
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  2. Minghui Hong
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Correspondence to Rui Zhou .

Editor information

Editors and Affiliations

  1. RIKEN-SIOM Joint Research Unit, RIKEN Center for Advanced Photonics RIKEN-SIOM Joint Research Unit, Wako, Saitama, Japan

    Koji Sugioka

Section Editor information

  1. Department of Electrical & Computer Engineering, National University of Singapore, Singapore, Singapore

    Minghui Hong

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Zhou, R., Hong, M. (2020). Laser Cleaning of Contaminated Substrate Surfaces. In: Sugioka, K. (eds) Handbook of Laser Micro- and Nano-Engineering. Springer, Cham. https://doi.org/10.1007/978-3-319-69537-2_37-1

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  • DOI: https://doi.org/10.1007/978-3-319-69537-2_37-1

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-69537-2

  • Online ISBN: 978-3-319-69537-2

  • eBook Packages: Springer Reference Physics and AstronomyReference Module Physical and Materials ScienceReference Module Chemistry, Materials and Physics

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