Abstract
With a significantly improved processing precision, quality, and flexibility in 3D space, ultrashort pulse laser processing at the micro- and nanoscales has exhibited superior performances in the fields of fundamental research and industrial manufacturing as compared with traditional long-pulse and continuous laser processing in the past decades. In this chapter, basic optics for ultrashort pulse laser micro-/nanoprocessing are introduced. Specifically, basic optical setups of two representative processing systems (3D ultrashort laser direct writing systems and laser parallel processing systems) are described as well as their crucial optical components. Recent advances of ultrashort laser micro-/nanoprocessing such as spatiotemporal beam shaping and homogenization of femtosecond laser pulses are presented. Moreover, typical diagnosis systems for ultrashort pulse laser processing such as basic optical setups for measurement of pulse durations and transient pump-probe imaging are briefly summarized.
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Xu, J., Cheng, Y., Sugioka, K. (2021). Basic Optics and Diagnostics Apparatus for Ultrashort Pulse Laser Micro-/Nanoprocessing. In: Sugioka, K. (eds) Handbook of Laser Micro- and Nano-Engineering. Springer, Cham. https://doi.org/10.1007/978-3-030-63647-0_8
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DOI: https://doi.org/10.1007/978-3-030-63647-0_8
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