Abstract
The shaping of the intensity and/or phase distribution of a laser beam during the laser irradiation of materials is of critical importance for enhancing efficiency, precision, and functionality in laser manufacturing. In this chapter, optics for laser beam shaping in laser processing is introduced. Specifically, beam homogenizers, optics for generating nonconventional beams, multi-focus optics, and mask projection optics, which are the most widely used optics for laser materials processing, are described.
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References
Abdou Ahmed M, Schulz J, Voss A, Parriaux O, Pommier JC, Graf T (2007) Opt Lett 32:1824
Allegre OJ, Perrie W, Edwardson SP, Dearden G, Watkins KG (2012) J Opt 14:085601
Allen L, Beijersbergen MW, Spreeuw RJC, Woerdman JP (1992) Phys Rev A 45:8185
Amako J, Sawaki D, Fujii E (2003) J Opt Soc Am B 20:2562
Bhuian B, Winfield RJ, O’Brien S, Crean GM (2007) Appl Surf Sci 254:841
Bhuyan MK, Courvoisier F, Lacourt PA, Jacquot M, Furfaro L, Withford MJ, Dudley JM (2010a) Opt Express 18:566
Bhuyan MK, Courvoisier F, Lacourt PA, Jacquot M, Salut R, Furfaro L, Dudley JM (2010b) Appl Phys Lett 97:081102
Bich A, Rieck J, Dumouchel C, Roth S, Weible KJ, Eisner M, Voelkel R, Zimmermann M, Rank M, Schmidt M, Bitterli R, Ramanan N, Ruffieux P, Scharf T, Noell W, Herzig H-P, De Rooij N (2008) Proc SPIE 6879:68790Q
Borek GT, Brown DR (1999) Proc SPIE 3633:51
Cong W-X, Chen N-X, Gu B-Y (1998) J Opt Soc Am A 15:2362
Courvoisier F, Lacourt PA, Jacquot M, Bhuyan MK, Furfaro L, Dudley JM (2009) Opt Lett 34:3163
Courvoisier F, Stoian R, Couairon A (2016) Opt Laser Technol 80:125
De Saint Denis R, Passilly N, Laroche M, Mohammed-Brahim T, Aït-Ameur K (2006) Appl Opt 45:8136
Dickey FM, Holswade SC (2000) Laser beam shaping: theory and techniques. Marcel Dekker, New York
Dong XZ, Zhao ZS, Duan XM (2007) Appl Phys Lett 91:124103
Dudutis J, Gečys P, Račiukaitis G (2016) Opt Express 24:28433
Duocastella M, Arnold CB (2012) Laser Photonics Rev 6:607
Durnin J, Miceli JJ, Eberly JH (1987) Phys Rev Lett 58:1499
Eah S-K, Jhe W, Arakawa Y (2003) Rev Sci Instrum 74:4969
Frieden BR (1965) Appl Opt 4:1400
Fuse K (2007) Rev Laser Eng 35:309
Fuse K (2010) J Laser Micro/Nanoeng 5:156
Fuse K (2015) Laser Tech J 12:19
Fuse K, Hirai T, Ushiro T, Okada T, Kurisu K, Ebata K (2003) J Laser Appl 15:246
Grosjean T, Saleh SS, Suarez MA, Ibrahim IA, Piquerey V, Charraut D, Sandoz P (2007) Appl Opt 46:8061
Hamazaki J, Morita R, Chujo K, Kobayashi Y, Tanda S, Omatsu T (2010) Opt Express 18:2144
Harder I, Lano M, Lindlein N, Schwider J (2004) Proc SPIE 5456:99
Harvey EC, Rumsby PT (1997) Proc SPIE 3223:26
He F, Yu J, Tan Y, Chu W, Zhou C, Cheng Y, Sugioka K (2017) Sci Rep 7:40785
Hnatovsky C, Shvedov VG, Krolikowski W, Rode AV (2010) Opt Lett 35:3417
Hoffnagle JA, Jefferson CM (2000) Appl Opt 39:5488
Ježek J, Čižmár T, Nedĕla V, Zemánek P (2006) Opt Express 14:8506
Jiang W, Shealy DL, Martin JC (1993) Proc SPIE 2000:64
Jin Y, Zhao Y, Jiang Y (2016) J Laser Appl 28:022601
Kato J, Takeyasu N, Adachi Y, Sun HB, Kawata S (2005) Appl Phys Lett 86:044102
Klug U, Düsing JF, Sato T, Washio K, Kling R (2010) Proc SPIE 7590:759006
Kondo T, Matsuo S, Juodkazis S, Mizeikis V, Misawa H (2003) Appl Phys Lett 82:2758
Kondo T, Juodkazis S, Mizeikis V, Matsuo S, Misawa H (2006) New J Phys 8:250
Kozawa Y, Sato S (2005) Opt Lett 30:3063
Kreuzer JL (1969) US Patent 3476463
Lai WJ, Lim BC, Phua PB, Tiaw KS, Teo HH, Hong MH (2008) Opt Express 16:15694
Lasagni AF, Gachot C, Trinh KE, Hans M, Rosenkranz A, Roch T, Eckhardt S, Kunze T, Bieda M, Günther D, Lang V, Mücklich F (2017) Proc SPIE 10092:1009211
Li J, Ueda K, Musha M, Shirakawa A (2006) Opt Lett 31:2969
Li XF, Winfield RJ, O’Brien S, Crean GM (2009a) Appl Surf Sci 255:5146
Li L, Gattass RR, Gershgoren E, Hwang H, Fourkas JT (2009b) Science 324:910
Machavariani G, Lumer Y, Moshe I, Meir A, Jackel S (2007) Opt Lett 32:1468
Marcinkevičius A, Juodkazis S, Matsuo S, Mizeikis V, Misawa H (2001) Jpn J Appl Phys 40:L1197
Matsuo S, Juodkazis S, Misawa H (2005) Appl Phys A Mater Sci Process 80:683
Matsuoka Y, Kizuka Y, Inoue T (2006) Appl Phys A Mater Sci Process 84:423
McGloin D, Dholakia K (2005) Contemp Phys 46:15
McLeod JH (1954) J Opt Soc Am 44:592
Meier M, Romano V, Feurer T (2007) Appl Phys A Mater Sci Process 86:329
Mermillod-Blondin A, McLeod E, Arnold CB (2008) Appl Phys A Mater Sci Process 93:231
Mori S (2015) Precis Eng 39:79
Nakata Y, Okada T, Maeda M (2002) Appl Phys Lett 81:4239
Nivas JJ, Shutong H, Anoop KK, Rubano A, Fittipaldi R, Vecchione A, Paparo D, Marrucci L, Bruzzese R, Amoruso S (2015) Opt Lett 40:4611
Niziev VG, Nesterov AV (1999) J Phys D 32:1455
Nolte S, Momma C, Kamlage G, Ostendorf A, Fallnich C, von Alvensleben F, Welling H (1999) Appl Phys A Mater Sci Process 68:563
Obata K, Koch J, Hinze U, Chichkov BN (2010) Opt Express 18:17193
Omatsu T, Chujo K, Miyamoto K, Okida M, Nakamura K, Aoki N, Morita R (2010) Opt Express 18:17967
Padgett M, Courtial J, Allen L (2004) Phys Today 57:35
Račiukaitis G, Stankevičius E, Gečys P, Gedvilas M, Bischoff C, Jäger E, Umhofer U, Völklein F (2011) J Laser Micro/Nanoeng 6:37
Rhodes PW, Shealy DL (1980) Appl Opt 19:3545
Rizvi NH, Apte P (2002) J Mater Proc Technol 127:206
Rizvi NH, Milne DK, Rumsby PT, Gower MC (2000) Proc SPIE 3933:261
Rothschild M (2005) Mater Today 8:18
Shafer D (1982) Opt Laser Technol 14:159
Stoian R, Bhuyan MK, Zhang G, Cheng G, Meyer R, Courvoisier F (2018) Adv Opt Technol 7:165
Sueda K, Miyaji G, Miyanaga N, Nakatsuka M (2004) Opt Express 12:3548
Takahashi F, Miyamoto K, Hidai H, Yamane K, Morita R, Omatsu T (2016) Sci Rep 6:21738
Tan KM, Mazilu M, Chow TH, Lee WM, Taguchi K, Ng BK, Sibbett W, Herrington CS, Brown CTA, Dholakia K (2009) Opt Express 17:2375
Tidwell SC, Ford DH, Kimura WD (1990) Appl Opt 29:2234
Vasara A, Turunen J, Friberg AT (1989) J Opt Soc Am A 6:1748
Weber R, Michalowski A, Abdou-Ahmed M, Onuseit V, Rominger V, Kraus M, Graf T (2011) Phys Procedia 12:21
Wippermann F, Zeitner UD, Dannberg P, Bräuer A, Sinzinger S (2007) Opt Express 15:6218
Yao AM, Padgett MJ (2011) Adv Opt Photon 3:161
Yin J, Noh HR, Lee KI, Kim KH, Wang YZ, Jhe W (1997) Opt Commun 138:287
Yonezawa K, Kozawa Y, Sato S (2006) Opt Lett 31:2151
Zeng D, Latham WP, Kar A (2006) Proc SPIE 6290:62900J
Zhang S, Neil G, Shinn M (2003) Opt Express 11:1942
Zimmermann M, Lindlein N, Voelkel R, Weible KJ (2007) Proc SPIE 6663:666302
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Xu, J., Cheng, Y., Sugioka, K. (2021). Optics for Beam Shaping in Laser Processing. In: Sugioka, K. (eds) Handbook of Laser Micro- and Nano-Engineering. Springer, Cham. https://doi.org/10.1007/978-3-030-63647-0_2
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DOI: https://doi.org/10.1007/978-3-030-63647-0_2
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