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ARDE
Definition
ARDE is the phenomenon of the etching rate related to the aspect ratio. The larger the aspect ratio, the lower the etching rate.
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© 2008 Springer-Verlag
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(2008). Aspect Ratio Dependent Etching. In: Li, D. (eds) Encyclopedia of Microfluidics and Nanofluidics. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-48998-8_56
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DOI: https://doi.org/10.1007/978-0-387-48998-8_56
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-387-32468-5
Online ISBN: 978-0-387-48998-8
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