Abstract
Glassy carbon (GC) has merits to be used as mold material for glass molding press because of its superior chemical and thermal properties. However, it is difficult to machine GC mechanically because of its brittleness and hardness. Undesired fractures and cracks are frequently generated on the machined surfaces. A novel micromachining process for precision machining of GC that combines mechanical micromachining and electrochemical oxidation has been developed. In the proposed process, an oxide layer is generated on the GC surface and removed mechanically. In the contact area between the tool and workpiece, the generation and removal of the oxide layer are repeated. A number of experimental results are presented to investigate the machining characteristics and to show the feasibility of the proposed process.
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Nagaoka, T. and Yoshino, T., “Surface Properties of Electrochemically Retreated Glassy Carbon,” Analytical Chemistry, Vol. 58, No. 6, pp. 1037–1042, 1986.
Cao, X. D., Kim, B. H., and Chu, C. N., “Hybrid Micromachining of Glass using ECDM and Micro Grinding,” Int. J. Precis. Eng. Manuf., Vol. 14, No. 1, pp. 5–10, 2013.
Magee, L. J. and Osteryoung, J., “Fabrication and Characterization of Glassy Carbon Linear Array Electrodes,” Analytical Chemistry, Vol. 61, No. 18, pp. 2124–2126, 1989.
Youn, S. W., Takahashi, M., Goto, H., and Maeda. R., “Fabrication of Micro-Mold for Glass Embossing using Focused Ion Beam, Femto-Second Laser, Eximer Laser and Dicing Techniques,” Journal of Materials Processing Technology, Vols. 187–188, pp. 326–330, 2007.
Kuhnke, M., Lippert, T., Ortelli, E., Scherer, G. G., and Wokaun, A., “Microstructuring of Glassy Carbon: Comparison of Laser Machining and Reactive Ion Etching,” Thin Solid Films, Vols. 453–454, pp. 36–41, 2004.
Takahashi, M., Sugimoto, K., and Maeda. R., “Nanoimprint of Glass Materials with Glassy Carbon Molds Fabricated by Focused-Ion-Beam Etching,” Japanese Journal of Applied Physics, Vol. 44, No. 7S, pp. 5600–5605, 2005.
Youn, S. W., Takahashi, M, Goto, H., and Maeda, R., “A Study on Focused Ion Beam Milling of Glassy Carbon Molds for the Thermal Imprinting of Quartz and Borosilicate Glasses,” Journal of Micromechanics and Microengineering, Vol. 16, No. 12, pp. 2576–2584, 2006.
Jang, K.-I., Seok, J., Min, B.-K., and Lee, S. J., “An Electrochemomechanical Polishing Process Using Magnetorheological Fluid,” International Journal of Machine Tools and Manufacture, Vol. 50, No. 10, pp. 869–881, 2010.
Jang, K.-I., Nam, E., Lee, C.-Y., Seok, J., and Min, B.-K., “Mechanism of Synergetic Material Removal by Electrochemomechanical Magnetorheological Polishing,” International Journal of Machine Tools and Manufacture, Vol. 70, pp. 88–92, 2013.
Macdonald, D. D., “The Point Defect Model for the Passive State,” Journal of the Electrochemical Society, Vol. 139, No. 12, pp. 3434–3449, 1992.
Ritchie, R. O., Dauskardt, R. H., Yu, W., and Brendzel, A. M., “Cyclic Fatigue-Crack Propagation, Stress-Corrosion, and Fracture-Toughness Behavior in Pyrolytic Carbon-Coated Graphite for Prosthetic Heart Valve Applications,” Journal of Biomedical Materials Research, Vol. 24, No. 2, pp. 189–206, 1990.
Lee, S. H., Lee, K. H., Lee, S. B. and Kim, B. M., “Study of Edge-Cracking Characteristics during Thin-Foil Rolling of Cu-Fe-P Strip,” Int. J. Precis. Eng. Manuf., Vol. 14, No. 12, pp. 2109–2118, 2013.
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Lee, W., Nam, E., Lee, CY. et al. Electrochemical oxidation assisted micromachining of glassy carbon substrate. Int. J. Precis. Eng. Manuf. 16, 419–422 (2015). https://doi.org/10.1007/s12541-015-0057-6
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DOI: https://doi.org/10.1007/s12541-015-0057-6