Abstract
Diamond-like carbon (DLC) has been of interest as a promising coating for protection and insulating layer in micro-electromechanical systems due to high hardness, wear resistance, transparency in IR range, chemical inertness and biocompatibility. The interfacial effect on thermal transport is studied for DLC films deposited on Al2O3 substrates with an ion gun method. Thermal conductivity of DLC thin films is measured with a 3ω method. DLC films show the thickness-dependent thermal conductivity, which is understood with the interfacial thermal resistance between DLC thin film and Al2O3 substrate. The interfacial thermal resistance and thermal conductivity of bulk DLC are determined with the measured thickness-dependent thermal conductivity of DLC films.
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This paper was recommended for publication in revised form by Associate Editor Dongsik Kim
Jong Wook Kim received a B.S. in Mechanical Engineering from KAIST in 1998. He then received his M.S. in Mechanical Engineering from Hanyang University in 2000 and is currently a Ph.D candidate at the School of Mechanical Engineering at Pusan National University in Korea.
Ho-Soon Yang received a B.S. in Physics Education and an M.S. in Physics from Pusan National University in 1987 and 1989, respectively. She then received her Ph.D. in Physics from the University of Georgia in 2000. She is currently a professor at the Department of Physics at Pusan National University in Korea.
Young Ha Jun received a B.S. and an M.S. in Physics from Pusan National University in 1982 and 1984, respectively. He then received his Ph.D. in Physics from the University of Cincinnati in 1994. He is currently the president of J&L Tech. Ltd in Korea.
Kyung Chun Kim received a B.S. in Mechanical Design Engineering from Pusan National University in 1979. He then received his M.S. and Ph.D. in Mechanical Engineering from KAIST in 1981 and 1987, respectively. He is currently a professor at the School of Mechanical Engineering at Pusan National University in Korea.
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Kim, J.W., Yang, HS., Jun, Y.H. et al. Interfacial effect on thermal conductivity of diamond-like carbon films. J Mech Sci Technol 24, 1511–1514 (2010). https://doi.org/10.1007/s12206-010-0416-2
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DOI: https://doi.org/10.1007/s12206-010-0416-2