Abstract
For the first time, sputtered zinc oxide (ZnO) thin films have been used as a CO2 gas sensor. Zinc oxide thin films have been synthesized using reactive d.c. sputtering method for gas sensor applications, in the deposition temperature range from 130–153°C at a chamber pressure of 8·5 mbar for 18 h. Argon and oxygen gases were used as sputtering and reactive gases, respectively. ZnO phase could be crystallized using a pure metal target of zinc. The structure of the films determined by means of X-ray diffraction method indicates that the zinc oxide single phase can be fabricated in this substrate temperature range. The sensitivity of the film synthesized at substrate temperature of 130°C is 2·17 in the presence of CO2 gas at a measuring temperature of 100°C.
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Cadieu F J 1992 Physics of thin films (San Diego: Academic Press) Ch. 2, Vol. 16, p. 53
Cao H, Wu J Y, Ong H C, Dai J Y and Chang R P H 1998 Appl. Phys. Lett. 73 572
Hegde H, Samarasekara P and Cadieu F J 1994 J. Appl. Phys. 75 6640
Hossain M K, Ghosh S C, Boontongkong Y, Thanachaynont C and Dutta J 2005 Journal of Metastable and Nanocrystalline Materials 23 27
Jayaraj M K, Antony A and Ramachandran M 2002 Bull. Mater. Sci. 25 227
Jeong S H, Lee S B and Boo J H 2004 Curr. Appl. Phys. 4 655
Jo S H, Lao J Y, Ren Z F, Farrer R A, Baldcchini T and Fourkas J T 2003 Appl. Phys. Lett. 83 4821
Roy S and Basu S 2002 Bull. Mater. Sci. 25 513
Samarasekara P 2002 Chinese J. Phys. 40 631
Samarasekara P, Rani R, Cadieu F J and Shaheen S A 1996 J. Appl. Phys. 79 5425
Samarasekara P, Nisantha A G K and Disanayake A S 2002 Chinese J. Phys. 40 196
Samarasekara P, Kumara N T R N and Yapa N U S 2006 J. Phys. Condens. Matter 18 2417
Viswanath R N, Ramasamy S R, Ramamoorthy R, Jayavel P and Nagarajan T 1995 Nano Structured Materials 6 993
Wu M S, Azuma A, Shiosaki T and Kawabata A 1989 IEEE Trans. Ultrasonics, Ferroelectric & Frequency Control 36 442
Xiaoyu Siu, Mark H Kryder, Bunsen Y Wong and David E Laughlin 1993 IEEE Trans. Magn. 29 3751
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Samarasekara, P., Yapa, N.U.S., Kumara, N.T.R.N. et al. CO2 gas sensitivity of sputtered zinc oxide thin films. Bull Mater Sci 30, 113–116 (2007). https://doi.org/10.1007/s12034-007-0020-y
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DOI: https://doi.org/10.1007/s12034-007-0020-y